5/10/2010	9:09:59 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2010	9:10:00 AM	Recipe started at 9:10 AM
5/10/2010	9:10:00 AM	H2 valve closed
5/10/2010	9:10:00 AM	BCl3 valve closed
5/10/2010	9:10:00 AM	PH3 valve closed
5/10/2010	9:10:00 AM	SiCl4 pre valve closed
5/10/2010	9:10:00 AM	SiCl4 post valve closed
5/10/2010	9:10:00 AM	Main Vac valve closed
5/10/2010	9:10:00 AM	Bypass valve closed
5/10/2010	9:10:00 AM	Bubbler valve closed
5/10/2010	9:10:00 AM	Helium valve opened
5/10/2010	9:10:00 AM	Helium MFC set to  500.000000
5/10/2010	9:10:00 AM	H2 MFC set to  0.000000
5/10/2010	9:10:00 AM	BCl3 MFC set to  0.000000
5/10/2010	9:10:00 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:10:00 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:10:00 AM	Tube furnace set to 0
5/10/2010	9:11:21 AM	Helium valve closed
5/10/2010	9:11:21 AM	H2 valve closed
5/10/2010	9:11:21 AM	BCl3 valve closed
5/10/2010	9:11:21 AM	PH3 valve closed
5/10/2010	9:11:21 AM	SiCl4 pre valve closed
5/10/2010	9:11:21 AM	SiCl4 post valve closed
5/10/2010	9:11:21 AM	Main Vac valve closed
5/10/2010	9:11:21 AM	Bypass valve closed
5/10/2010	9:11:21 AM	Bubbler valve closed
5/10/2010	9:11:21 AM	Helium MFC set to  0.000000
5/10/2010	9:11:21 AM	H2 MFC set to  0.000000
5/10/2010	9:11:21 AM	BCl3 MFC set to  0.000000
5/10/2010	9:11:21 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:11:21 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:11:21 AM	Tube furnace set to 0
5/10/2010	9:11:21 AM	Run finished at 9:11 AM
5/10/2010	9:11:21 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2010	9:14:49 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2010	9:14:50 AM	Recipe started at 9:14 AM
5/10/2010	9:14:50 AM	Helium valve closed
5/10/2010	9:14:50 AM	H2 valve closed
5/10/2010	9:14:50 AM	BCl3 valve closed
5/10/2010	9:14:50 AM	PH3 valve closed
5/10/2010	9:14:50 AM	SiCl4 pre valve closed
5/10/2010	9:14:50 AM	SiCl4 post valve closed
5/10/2010	9:14:50 AM	Main Vac valve closed
5/10/2010	9:14:50 AM	Bubbler valve closed
5/10/2010	9:14:50 AM	Bypass valve opened
5/10/2010	9:14:50 AM	Helium MFC set to  0.000000
5/10/2010	9:14:50 AM	H2 MFC set to  0.000000
5/10/2010	9:14:50 AM	BCl3 MFC set to  0.000000
5/10/2010	9:14:50 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:14:50 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:14:50 AM	Tube furnace set to 0
5/10/2010	9:15:35 AM	Helium valve closed
5/10/2010	9:15:35 AM	H2 valve closed
5/10/2010	9:15:35 AM	BCl3 valve closed
5/10/2010	9:15:35 AM	PH3 valve closed
5/10/2010	9:15:35 AM	SiCl4 pre valve closed
5/10/2010	9:15:35 AM	SiCl4 post valve closed
5/10/2010	9:15:35 AM	Bubbler valve closed
5/10/2010	9:15:35 AM	Main Vac valve opened
5/10/2010	9:15:35 AM	Bypass valve opened
5/10/2010	9:15:35 AM	Helium MFC set to  0.000000
5/10/2010	9:15:35 AM	H2 MFC set to  0.000000
5/10/2010	9:15:35 AM	BCl3 MFC set to  0.000000
5/10/2010	9:15:35 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:15:35 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:15:35 AM	Tube furnace set to 0
5/10/2010	9:15:35 AM	Run finished at 9:15 AM
5/10/2010	9:15:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2010	9:16:21 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/10/2010	9:16:27 AM	Recipe started at 9:16 AM
5/10/2010	9:16:27 AM	H2 valve closed
5/10/2010	9:16:27 AM	BCl3 valve closed
5/10/2010	9:16:27 AM	PH3 valve closed
5/10/2010	9:16:27 AM	SiCl4 pre valve closed
5/10/2010	9:16:27 AM	SiCl4 post valve closed
5/10/2010	9:16:27 AM	Main Vac valve closed
5/10/2010	9:16:27 AM	Bypass valve closed
5/10/2010	9:16:27 AM	Bubbler valve closed
5/10/2010	9:16:27 AM	Helium valve opened
5/10/2010	9:16:27 AM	Helium MFC set to  500.000000
5/10/2010	9:16:27 AM	H2 MFC set to  0.000000
5/10/2010	9:16:27 AM	BCl3 MFC set to  0.000000
5/10/2010	9:16:27 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:16:27 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:16:27 AM	Tube furnace set to 0
5/10/2010	9:17:50 AM	Helium valve closed
5/10/2010	9:17:50 AM	H2 valve closed
5/10/2010	9:17:50 AM	BCl3 valve closed
5/10/2010	9:17:50 AM	PH3 valve closed
5/10/2010	9:17:50 AM	SiCl4 pre valve closed
5/10/2010	9:17:50 AM	SiCl4 post valve closed
5/10/2010	9:17:50 AM	Main Vac valve closed
5/10/2010	9:17:50 AM	Bypass valve closed
5/10/2010	9:17:50 AM	Bubbler valve closed
5/10/2010	9:17:50 AM	Helium MFC set to  0.000000
5/10/2010	9:17:50 AM	H2 MFC set to  0.000000
5/10/2010	9:17:50 AM	BCl3 MFC set to  0.000000
5/10/2010	9:17:50 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:17:50 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:17:50 AM	Tube furnace set to 0
5/10/2010	9:18:05 AM	Helium valve closed
5/10/2010	9:18:05 AM	H2 valve closed
5/10/2010	9:18:05 AM	BCl3 valve closed
5/10/2010	9:18:05 AM	PH3 valve closed
5/10/2010	9:18:05 AM	SiCl4 pre valve closed
5/10/2010	9:18:05 AM	SiCl4 post valve closed
5/10/2010	9:18:05 AM	Main Vac valve closed
5/10/2010	9:18:05 AM	Bubbler valve closed
5/10/2010	9:18:05 AM	Bypass valve opened
5/10/2010	9:18:05 AM	Helium MFC set to  0.000000
5/10/2010	9:18:05 AM	H2 MFC set to  0.000000
5/10/2010	9:18:05 AM	BCl3 MFC set to  0.000000
5/10/2010	9:18:05 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:18:05 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:18:05 AM	Tube furnace set to 0
5/10/2010	9:18:37 AM	Helium valve closed
5/10/2010	9:18:37 AM	H2 valve closed
5/10/2010	9:18:37 AM	BCl3 valve closed
5/10/2010	9:18:37 AM	PH3 valve closed
5/10/2010	9:18:37 AM	SiCl4 pre valve closed
5/10/2010	9:18:37 AM	SiCl4 post valve closed
5/10/2010	9:18:37 AM	Bubbler valve closed
5/10/2010	9:18:37 AM	Main Vac valve opened
5/10/2010	9:18:37 AM	Bypass valve opened
5/10/2010	9:18:37 AM	Helium MFC set to  0.000000
5/10/2010	9:18:37 AM	H2 MFC set to  0.000000
5/10/2010	9:18:37 AM	BCl3 MFC set to  0.000000
5/10/2010	9:18:37 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:18:37 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:18:37 AM	Tube furnace set to 0
5/10/2010	9:23:37 AM	H2 valve closed
5/10/2010	9:23:37 AM	BCl3 valve closed
5/10/2010	9:23:37 AM	PH3 valve closed
5/10/2010	9:23:37 AM	SiCl4 pre valve closed
5/10/2010	9:23:37 AM	SiCl4 post valve closed
5/10/2010	9:23:37 AM	Main Vac valve closed
5/10/2010	9:23:37 AM	Bypass valve closed
5/10/2010	9:23:37 AM	Bubbler valve closed
5/10/2010	9:23:37 AM	Helium valve opened
5/10/2010	9:23:37 AM	Helium MFC set to  500.000000
5/10/2010	9:23:37 AM	H2 MFC set to  0.000000
5/10/2010	9:23:37 AM	BCl3 MFC set to  0.000000
5/10/2010	9:23:37 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:23:37 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:23:38 AM	Tube furnace set to 0
5/10/2010	9:25:00 AM	Helium valve closed
5/10/2010	9:25:00 AM	H2 valve closed
5/10/2010	9:25:00 AM	BCl3 valve closed
5/10/2010	9:25:00 AM	PH3 valve closed
5/10/2010	9:25:00 AM	SiCl4 pre valve closed
5/10/2010	9:25:00 AM	SiCl4 post valve closed
5/10/2010	9:25:00 AM	Main Vac valve closed
5/10/2010	9:25:00 AM	Bypass valve closed
5/10/2010	9:25:00 AM	Bubbler valve closed
5/10/2010	9:25:00 AM	Helium MFC set to  0.000000
5/10/2010	9:25:00 AM	H2 MFC set to  0.000000
5/10/2010	9:25:00 AM	BCl3 MFC set to  0.000000
5/10/2010	9:25:00 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:25:00 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:25:00 AM	Tube furnace set to 0
5/10/2010	9:25:15 AM	Helium valve closed
5/10/2010	9:25:15 AM	H2 valve closed
5/10/2010	9:25:15 AM	BCl3 valve closed
5/10/2010	9:25:15 AM	PH3 valve closed
5/10/2010	9:25:15 AM	SiCl4 pre valve closed
5/10/2010	9:25:15 AM	SiCl4 post valve closed
5/10/2010	9:25:15 AM	Main Vac valve closed
5/10/2010	9:25:15 AM	Bubbler valve closed
5/10/2010	9:25:15 AM	Bypass valve opened
5/10/2010	9:25:15 AM	Helium MFC set to  0.000000
5/10/2010	9:25:15 AM	H2 MFC set to  0.000000
5/10/2010	9:25:15 AM	BCl3 MFC set to  0.000000
5/10/2010	9:25:15 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:25:15 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:25:15 AM	Tube furnace set to 0
5/10/2010	9:25:47 AM	Helium valve closed
5/10/2010	9:25:47 AM	H2 valve closed
5/10/2010	9:25:47 AM	BCl3 valve closed
5/10/2010	9:25:47 AM	PH3 valve closed
5/10/2010	9:25:47 AM	SiCl4 pre valve closed
5/10/2010	9:25:47 AM	SiCl4 post valve closed
5/10/2010	9:25:48 AM	Bubbler valve closed
5/10/2010	9:25:48 AM	Main Vac valve opened
5/10/2010	9:25:48 AM	Bypass valve opened
5/10/2010	9:25:48 AM	Helium MFC set to  0.000000
5/10/2010	9:25:48 AM	H2 MFC set to  0.000000
5/10/2010	9:25:48 AM	BCl3 MFC set to  0.000000
5/10/2010	9:25:48 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:25:48 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:25:48 AM	Tube furnace set to 0
5/10/2010	9:27:34 AM	H2 valve closed
5/10/2010	9:27:34 AM	BCl3 valve closed
5/10/2010	9:27:34 AM	PH3 valve closed
5/10/2010	9:27:34 AM	SiCl4 pre valve closed
5/10/2010	9:27:34 AM	SiCl4 post valve closed
5/10/2010	9:27:34 AM	Main Vac valve closed
5/10/2010	9:27:34 AM	Bypass valve closed
5/10/2010	9:27:34 AM	Bubbler valve closed
5/10/2010	9:27:34 AM	Helium valve opened
5/10/2010	9:27:34 AM	Helium MFC set to  500.000000
5/10/2010	9:27:34 AM	H2 MFC set to  0.000000
5/10/2010	9:27:34 AM	BCl3 MFC set to  0.000000
5/10/2010	9:27:34 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:27:34 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:27:34 AM	Tube furnace set to 0
5/10/2010	9:28:57 AM	Helium valve closed
5/10/2010	9:28:57 AM	H2 valve closed
5/10/2010	9:28:57 AM	BCl3 valve closed
5/10/2010	9:28:57 AM	PH3 valve closed
5/10/2010	9:28:57 AM	SiCl4 pre valve closed
5/10/2010	9:28:57 AM	SiCl4 post valve closed
5/10/2010	9:28:57 AM	Main Vac valve closed
5/10/2010	9:28:57 AM	Bypass valve closed
5/10/2010	9:28:57 AM	Bubbler valve closed
5/10/2010	9:28:57 AM	Helium MFC set to  0.000000
5/10/2010	9:28:57 AM	H2 MFC set to  0.000000
5/10/2010	9:28:57 AM	BCl3 MFC set to  0.000000
5/10/2010	9:28:57 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:28:57 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:28:57 AM	Tube furnace set to 0
5/10/2010	9:29:12 AM	Helium valve closed
5/10/2010	9:29:12 AM	H2 valve closed
5/10/2010	9:29:12 AM	BCl3 valve closed
5/10/2010	9:29:12 AM	PH3 valve closed
5/10/2010	9:29:12 AM	SiCl4 pre valve closed
5/10/2010	9:29:12 AM	SiCl4 post valve closed
5/10/2010	9:29:12 AM	Main Vac valve closed
5/10/2010	9:29:12 AM	Bubbler valve closed
5/10/2010	9:29:12 AM	Bypass valve opened
5/10/2010	9:29:12 AM	Helium MFC set to  0.000000
5/10/2010	9:29:12 AM	H2 MFC set to  0.000000
5/10/2010	9:29:12 AM	BCl3 MFC set to  0.000000
5/10/2010	9:29:12 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:29:12 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:29:12 AM	Tube furnace set to 0
5/10/2010	9:29:44 AM	Helium valve closed
5/10/2010	9:29:44 AM	H2 valve closed
5/10/2010	9:29:44 AM	BCl3 valve closed
5/10/2010	9:29:44 AM	PH3 valve closed
5/10/2010	9:29:44 AM	SiCl4 pre valve closed
5/10/2010	9:29:44 AM	SiCl4 post valve closed
5/10/2010	9:29:44 AM	Bubbler valve closed
5/10/2010	9:29:44 AM	Main Vac valve opened
5/10/2010	9:29:44 AM	Bypass valve opened
5/10/2010	9:29:44 AM	Helium MFC set to  0.000000
5/10/2010	9:29:44 AM	H2 MFC set to  0.000000
5/10/2010	9:29:44 AM	BCl3 MFC set to  0.000000
5/10/2010	9:29:44 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:29:44 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:29:44 AM	Tube furnace set to 0
5/10/2010	9:34:44 AM	Helium valve closed
5/10/2010	9:34:44 AM	H2 valve closed
5/10/2010	9:34:44 AM	BCl3 valve closed
5/10/2010	9:34:44 AM	PH3 valve closed
5/10/2010	9:34:44 AM	SiCl4 pre valve closed
5/10/2010	9:34:44 AM	SiCl4 post valve closed
5/10/2010	9:34:44 AM	Bubbler valve closed
5/10/2010	9:34:45 AM	Main Vac valve opened
5/10/2010	9:34:45 AM	Bypass valve opened
5/10/2010	9:34:45 AM	Helium MFC set to  0.000000
5/10/2010	9:34:45 AM	H2 MFC set to  0.000000
5/10/2010	9:34:45 AM	BCl3 MFC set to  0.000000
5/10/2010	9:34:45 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:34:45 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:34:45 AM	Tube furnace set to 0
5/10/2010	9:34:46 AM	Run finished at 9:34 AM
5/10/2010	9:34:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/10/2010	9:40:03 AM	Main Vac valve closed
5/10/2010	9:40:06 AM	Bypass valve closed
5/10/2010	9:40:17 AM	Bypass valve opened
5/10/2010	9:40:19 AM	Main Vac valve opened
5/10/2010	9:41:39 AM	Recipe started at 9:41 AM
5/10/2010	9:41:39 AM	Helium valve closed
5/10/2010	9:41:39 AM	BCl3 valve closed
5/10/2010	9:41:39 AM	PH3 valve closed
5/10/2010	9:41:39 AM	SiCl4 pre valve closed
5/10/2010	9:41:39 AM	SiCl4 post valve closed
5/10/2010	9:41:39 AM	Main Vac valve closed
5/10/2010	9:41:39 AM	Bypass valve closed
5/10/2010	9:41:39 AM	Bubbler valve closed
5/10/2010	9:41:39 AM	H2 valve opened
5/10/2010	9:41:39 AM	Helium MFC set to  0.000000
5/10/2010	9:41:39 AM	H2 MFC set to  500.000000
5/10/2010	9:41:39 AM	BCl3 MFC set to  0.000000
5/10/2010	9:41:39 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:41:39 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:41:39 AM	Tube furnace set to 0
5/10/2010	9:43:02 AM	Helium valve closed
5/10/2010	9:43:02 AM	BCl3 valve closed
5/10/2010	9:43:02 AM	PH3 valve closed
5/10/2010	9:43:02 AM	SiCl4 pre valve closed
5/10/2010	9:43:02 AM	SiCl4 post valve closed
5/10/2010	9:43:02 AM	Main Vac valve closed
5/10/2010	9:43:02 AM	Bypass valve closed
5/10/2010	9:43:02 AM	H2 valve opened
5/10/2010	9:43:02 AM	Bubbler valve opened
5/10/2010	9:43:02 AM	Helium MFC set to  0.000000
5/10/2010	9:43:02 AM	H2 MFC set to  500.000000
5/10/2010	9:43:02 AM	BCl3 MFC set to  0.000000
5/10/2010	9:43:02 AM	SiCl4 MFC set to  0.000000
5/10/2010	9:43:02 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:43:02 AM	Tube furnace set to 1000
5/10/2010	10:04:42 AM	Helium valve closed
5/10/2010	10:04:42 AM	PH3 valve closed
5/10/2010	10:04:42 AM	Main Vac valve closed
5/10/2010	10:04:42 AM	Bypass valve closed
5/10/2010	10:04:42 AM	H2 valve opened
5/10/2010	10:04:42 AM	BCl3 valve opened
5/10/2010	10:04:42 AM	SiCl4 pre valve opened
5/10/2010	10:04:42 AM	SiCl4 post valve opened
5/10/2010	10:04:42 AM	Bubbler valve opened
5/10/2010	10:04:42 AM	Helium MFC set to  0.000000
5/10/2010	10:04:42 AM	H2 MFC set to  450.000000
5/10/2010	10:04:42 AM	BCl3 MFC set to  40.000000
5/10/2010	10:04:42 AM	SiCl4 MFC set to  350.000000
5/10/2010	10:04:42 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	10:04:42 AM	Tube furnace set to 1000
5/10/2010	10:24:42 AM	H2 valve closed
5/10/2010	10:24:42 AM	BCl3 valve closed
5/10/2010	10:24:42 AM	PH3 valve closed
5/10/2010	10:24:42 AM	SiCl4 pre valve closed
5/10/2010	10:24:42 AM	SiCl4 post valve closed
5/10/2010	10:24:42 AM	Main Vac valve closed
5/10/2010	10:24:42 AM	Bypass valve closed
5/10/2010	10:24:42 AM	Helium valve opened
5/10/2010	10:24:42 AM	Bubbler valve opened
5/10/2010	10:24:42 AM	Helium MFC set to  500.000000
5/10/2010	10:24:42 AM	H2 MFC set to  0.000000
5/10/2010	10:24:42 AM	BCl3 MFC set to  0.000000
5/10/2010	10:24:42 AM	SiCl4 MFC set to  0.000000
5/10/2010	10:24:42 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	10:24:42 AM	Tube furnace set to 0
5/10/2010	10:44:42 AM	Helium valve closed
5/10/2010	10:44:42 AM	H2 valve closed
5/10/2010	10:44:42 AM	BCl3 valve closed
5/10/2010	10:44:42 AM	PH3 valve closed
5/10/2010	10:44:42 AM	SiCl4 pre valve closed
5/10/2010	10:44:42 AM	SiCl4 post valve closed
5/10/2010	10:44:42 AM	Main Vac valve closed
5/10/2010	10:44:42 AM	Bypass valve closed
5/10/2010	10:44:42 AM	Bubbler valve closed
5/10/2010	10:44:42 AM	Helium MFC set to  0.000000
5/10/2010	10:44:42 AM	H2 MFC set to  0.000000
5/10/2010	10:44:42 AM	BCl3 MFC set to  0.000000
5/10/2010	10:44:42 AM	SiCl4 MFC set to  0.000000
5/10/2010	10:44:42 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	10:44:42 AM	Tube furnace set to 0
5/10/2010	10:44:43 AM	Run finished at 10:44 AM
5/10/2010	10:50:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2010	10:50:51 AM	Recipe started at 10:50 AM
5/10/2010	10:50:51 AM	Helium valve closed
5/10/2010	10:50:51 AM	H2 valve closed
5/10/2010	10:50:51 AM	BCl3 valve closed
5/10/2010	10:50:51 AM	PH3 valve closed
5/10/2010	10:50:51 AM	SiCl4 pre valve closed
5/10/2010	10:50:51 AM	SiCl4 post valve closed
5/10/2010	10:50:51 AM	Main Vac valve closed
5/10/2010	10:50:51 AM	Bubbler valve closed
5/10/2010	10:50:51 AM	Bypass valve opened
5/10/2010	10:50:51 AM	Helium MFC set to  0.000000
5/10/2010	10:50:51 AM	H2 MFC set to  0.000000
5/10/2010	10:50:51 AM	BCl3 MFC set to  0.000000
5/10/2010	10:50:51 AM	SiCl4 MFC set to  0.000000
5/10/2010	10:50:51 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	10:50:51 AM	Tube furnace set to 0
5/10/2010	10:51:35 AM	Helium valve closed
5/10/2010	10:51:35 AM	H2 valve closed
5/10/2010	10:51:35 AM	BCl3 valve closed
5/10/2010	10:51:35 AM	PH3 valve closed
5/10/2010	10:51:35 AM	SiCl4 pre valve closed
5/10/2010	10:51:35 AM	SiCl4 post valve closed
5/10/2010	10:51:35 AM	Bubbler valve closed
5/10/2010	10:51:35 AM	Main Vac valve opened
5/10/2010	10:51:35 AM	Bypass valve opened
5/10/2010	10:51:35 AM	Helium MFC set to  0.000000
5/10/2010	10:51:35 AM	H2 MFC set to  0.000000
5/10/2010	10:51:35 AM	BCl3 MFC set to  0.000000
5/10/2010	10:51:35 AM	SiCl4 MFC set to  0.000000
5/10/2010	10:51:35 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	10:51:35 AM	Tube furnace set to 0
5/10/2010	10:51:35 AM	Run finished at 10:51 AM
5/10/2010	10:51:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2010	10:52:22 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/10/2010	10:52:27 AM	Recipe started at 10:52 AM
5/10/2010	10:52:27 AM	H2 valve closed
5/10/2010	10:52:27 AM	BCl3 valve closed
5/10/2010	10:52:27 AM	PH3 valve closed
5/10/2010	10:52:27 AM	SiCl4 pre valve closed
5/10/2010	10:52:27 AM	SiCl4 post valve closed
5/10/2010	10:52:27 AM	Main Vac valve closed
5/10/2010	10:52:27 AM	Bypass valve closed
5/10/2010	10:52:27 AM	Bubbler valve closed
5/10/2010	10:52:27 AM	Helium valve opened
5/10/2010	10:52:27 AM	Helium MFC set to  500.000000
5/10/2010	10:52:27 AM	H2 MFC set to  0.000000
5/10/2010	10:52:27 AM	BCl3 MFC set to  0.000000
5/10/2010	10:52:27 AM	SiCl4 MFC set to  0.000000
5/10/2010	10:52:27 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	10:52:28 AM	Tube furnace set to 0
5/10/2010	10:53:46 AM	Helium valve closed
5/10/2010	10:53:46 AM	H2 valve closed
5/10/2010	10:53:46 AM	BCl3 valve closed
5/10/2010	10:53:46 AM	PH3 valve closed
5/10/2010	10:53:46 AM	SiCl4 pre valve closed
5/10/2010	10:53:46 AM	SiCl4 post valve closed
5/10/2010	10:53:46 AM	Main Vac valve closed
5/10/2010	10:53:46 AM	Bypass valve closed
5/10/2010	10:53:46 AM	Bubbler valve closed
5/10/2010	10:53:46 AM	Helium MFC set to  0.000000
5/10/2010	10:53:46 AM	H2 MFC set to  0.000000
5/10/2010	10:53:46 AM	BCl3 MFC set to  0.000000
5/10/2010	10:53:46 AM	SiCl4 MFC set to  0.000000
5/10/2010	10:53:46 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	10:53:46 AM	Tube furnace set to 0
5/10/2010	10:54:01 AM	Helium valve closed
5/10/2010	10:54:01 AM	H2 valve closed
5/10/2010	10:54:01 AM	BCl3 valve closed
5/10/2010	10:54:01 AM	PH3 valve closed
5/10/2010	10:54:01 AM	SiCl4 pre valve closed
5/10/2010	10:54:01 AM	SiCl4 post valve closed
5/10/2010	10:54:01 AM	Main Vac valve closed
5/10/2010	10:54:01 AM	Bubbler valve closed
5/10/2010	10:54:01 AM	Bypass valve opened
5/10/2010	10:54:01 AM	Helium MFC set to  0.000000
5/10/2010	10:54:01 AM	H2 MFC set to  0.000000
5/10/2010	10:54:01 AM	BCl3 MFC set to  0.000000
5/10/2010	10:54:01 AM	SiCl4 MFC set to  0.000000
5/10/2010	10:54:01 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	10:54:01 AM	Tube furnace set to 0
5/10/2010	10:54:32 AM	Helium valve closed
5/10/2010	10:54:32 AM	H2 valve closed
5/10/2010	10:54:32 AM	BCl3 valve closed
5/10/2010	10:54:32 AM	PH3 valve closed
5/10/2010	10:54:32 AM	SiCl4 pre valve closed
5/10/2010	10:54:32 AM	SiCl4 post valve closed
5/10/2010	10:54:32 AM	Bubbler valve closed
5/10/2010	10:54:32 AM	Main Vac valve opened
5/10/2010	10:54:32 AM	Bypass valve opened
5/10/2010	10:54:32 AM	Helium MFC set to  0.000000
5/10/2010	10:54:32 AM	H2 MFC set to  0.000000
5/10/2010	10:54:32 AM	BCl3 MFC set to  0.000000
5/10/2010	10:54:32 AM	SiCl4 MFC set to  0.000000
5/10/2010	10:54:32 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	10:54:32 AM	Tube furnace set to 0
5/10/2010	10:59:32 AM	H2 valve closed
5/10/2010	10:59:32 AM	BCl3 valve closed
5/10/2010	10:59:32 AM	PH3 valve closed
5/10/2010	10:59:32 AM	SiCl4 pre valve closed
5/10/2010	10:59:32 AM	SiCl4 post valve closed
5/10/2010	10:59:32 AM	Main Vac valve closed
5/10/2010	10:59:32 AM	Bypass valve closed
5/10/2010	10:59:32 AM	Bubbler valve closed
5/10/2010	10:59:32 AM	Helium valve opened
5/10/2010	10:59:32 AM	Helium MFC set to  500.000000
5/10/2010	10:59:32 AM	H2 MFC set to  0.000000
5/10/2010	10:59:32 AM	BCl3 MFC set to  0.000000
5/10/2010	10:59:32 AM	SiCl4 MFC set to  0.000000
5/10/2010	10:59:32 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	10:59:32 AM	Tube furnace set to 0
5/10/2010	11:00:52 AM	Helium valve closed
5/10/2010	11:00:52 AM	H2 valve closed
5/10/2010	11:00:52 AM	BCl3 valve closed
5/10/2010	11:00:52 AM	PH3 valve closed
5/10/2010	11:00:52 AM	SiCl4 pre valve closed
5/10/2010	11:00:52 AM	SiCl4 post valve closed
5/10/2010	11:00:52 AM	Main Vac valve closed
5/10/2010	11:00:52 AM	Bypass valve closed
5/10/2010	11:00:52 AM	Bubbler valve closed
5/10/2010	11:00:52 AM	Helium MFC set to  0.000000
5/10/2010	11:00:52 AM	H2 MFC set to  0.000000
5/10/2010	11:00:52 AM	BCl3 MFC set to  0.000000
5/10/2010	11:00:52 AM	SiCl4 MFC set to  0.000000
5/10/2010	11:00:52 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:00:52 AM	Tube furnace set to 0
5/10/2010	11:01:07 AM	Helium valve closed
5/10/2010	11:01:07 AM	H2 valve closed
5/10/2010	11:01:07 AM	BCl3 valve closed
5/10/2010	11:01:07 AM	PH3 valve closed
5/10/2010	11:01:07 AM	SiCl4 pre valve closed
5/10/2010	11:01:07 AM	SiCl4 post valve closed
5/10/2010	11:01:07 AM	Main Vac valve closed
5/10/2010	11:01:07 AM	Bubbler valve closed
5/10/2010	11:01:07 AM	Bypass valve opened
5/10/2010	11:01:07 AM	Helium MFC set to  0.000000
5/10/2010	11:01:07 AM	H2 MFC set to  0.000000
5/10/2010	11:01:07 AM	BCl3 MFC set to  0.000000
5/10/2010	11:01:07 AM	SiCl4 MFC set to  0.000000
5/10/2010	11:01:07 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:01:08 AM	Tube furnace set to 0
5/10/2010	11:01:39 AM	Helium valve closed
5/10/2010	11:01:39 AM	H2 valve closed
5/10/2010	11:01:39 AM	BCl3 valve closed
5/10/2010	11:01:39 AM	PH3 valve closed
5/10/2010	11:01:39 AM	SiCl4 pre valve closed
5/10/2010	11:01:39 AM	SiCl4 post valve closed
5/10/2010	11:01:39 AM	Bubbler valve closed
5/10/2010	11:01:39 AM	Main Vac valve opened
5/10/2010	11:01:39 AM	Bypass valve opened
5/10/2010	11:01:39 AM	Helium MFC set to  0.000000
5/10/2010	11:01:39 AM	H2 MFC set to  0.000000
5/10/2010	11:01:39 AM	BCl3 MFC set to  0.000000
5/10/2010	11:01:39 AM	SiCl4 MFC set to  0.000000
5/10/2010	11:01:39 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:01:39 AM	Tube furnace set to 0
5/10/2010	11:05:01 AM	H2 valve closed
5/10/2010	11:05:01 AM	BCl3 valve closed
5/10/2010	11:05:01 AM	PH3 valve closed
5/10/2010	11:05:01 AM	SiCl4 pre valve closed
5/10/2010	11:05:01 AM	SiCl4 post valve closed
5/10/2010	11:05:01 AM	Main Vac valve closed
5/10/2010	11:05:02 AM	Bypass valve closed
5/10/2010	11:05:02 AM	Bubbler valve closed
5/10/2010	11:05:02 AM	Helium valve opened
5/10/2010	11:05:02 AM	Helium MFC set to  500.000000
5/10/2010	11:05:02 AM	H2 MFC set to  0.000000
5/10/2010	11:05:02 AM	BCl3 MFC set to  0.000000
5/10/2010	11:05:02 AM	SiCl4 MFC set to  0.000000
5/10/2010	11:05:02 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:05:02 AM	Tube furnace set to 0
5/10/2010	11:05:09 AM	Helium valve closed
5/10/2010	11:05:09 AM	H2 valve closed
5/10/2010	11:05:09 AM	BCl3 valve closed
5/10/2010	11:05:09 AM	PH3 valve closed
5/10/2010	11:05:09 AM	SiCl4 pre valve closed
5/10/2010	11:05:09 AM	SiCl4 post valve closed
5/10/2010	11:05:09 AM	Main Vac valve closed
5/10/2010	11:05:09 AM	Bypass valve closed
5/10/2010	11:05:09 AM	Bubbler valve closed
5/10/2010	11:05:09 AM	Helium MFC set to  0.000000
5/10/2010	11:05:09 AM	H2 MFC set to  0.000000
5/10/2010	11:05:09 AM	BCl3 MFC set to  0.000000
5/10/2010	11:05:09 AM	SiCl4 MFC set to  0.000000
5/10/2010	11:05:09 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:05:10 AM	Tube furnace set to 0
5/10/2010	11:05:25 AM	Helium valve closed
5/10/2010	11:05:25 AM	H2 valve closed
5/10/2010	11:05:25 AM	BCl3 valve closed
5/10/2010	11:05:25 AM	PH3 valve closed
5/10/2010	11:05:25 AM	SiCl4 pre valve closed
5/10/2010	11:05:25 AM	SiCl4 post valve closed
5/10/2010	11:05:25 AM	Main Vac valve closed
5/10/2010	11:05:25 AM	Bubbler valve closed
5/10/2010	11:05:25 AM	Bypass valve opened
5/10/2010	11:05:25 AM	Helium MFC set to  0.000000
5/10/2010	11:05:25 AM	H2 MFC set to  0.000000
5/10/2010	11:05:25 AM	BCl3 MFC set to  0.000000
5/10/2010	11:05:25 AM	SiCl4 MFC set to  0.000000
5/10/2010	11:05:25 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:05:25 AM	Tube furnace set to 0
5/10/2010	11:05:32 AM	Helium valve closed
5/10/2010	11:05:32 AM	H2 valve closed
5/10/2010	11:05:32 AM	BCl3 valve closed
5/10/2010	11:05:32 AM	PH3 valve closed
5/10/2010	11:05:32 AM	SiCl4 pre valve closed
5/10/2010	11:05:32 AM	SiCl4 post valve closed
5/10/2010	11:05:32 AM	Bubbler valve closed
5/10/2010	11:05:32 AM	Main Vac valve opened
5/10/2010	11:05:32 AM	Bypass valve opened
5/10/2010	11:05:32 AM	Helium MFC set to  0.000000
5/10/2010	11:05:32 AM	H2 MFC set to  0.000000
5/10/2010	11:05:32 AM	BCl3 MFC set to  0.000000
5/10/2010	11:05:32 AM	SiCl4 MFC set to  0.000000
5/10/2010	11:05:32 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:05:32 AM	Tube furnace set to 0
5/10/2010	11:10:32 AM	Helium valve closed
5/10/2010	11:10:32 AM	H2 valve closed
5/10/2010	11:10:32 AM	BCl3 valve closed
5/10/2010	11:10:32 AM	PH3 valve closed
5/10/2010	11:10:32 AM	SiCl4 pre valve closed
5/10/2010	11:10:32 AM	SiCl4 post valve closed
5/10/2010	11:10:32 AM	Bubbler valve closed
5/10/2010	11:10:32 AM	Main Vac valve opened
5/10/2010	11:10:32 AM	Bypass valve opened
5/10/2010	11:10:32 AM	Helium MFC set to  0.000000
5/10/2010	11:10:32 AM	H2 MFC set to  0.000000
5/10/2010	11:10:32 AM	BCl3 MFC set to  0.000000
5/10/2010	11:10:32 AM	SiCl4 MFC set to  0.000000
5/10/2010	11:10:32 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:10:32 AM	Tube furnace set to 0
5/10/2010	11:10:33 AM	Run finished at 11:10 AM
5/10/2010	11:10:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/10/2010	11:13:39 AM	Main Vac valve closed
5/10/2010	11:13:42 AM	Bypass valve closed
5/10/2010	11:13:52 AM	Bypass valve opened
5/10/2010	11:13:53 AM	Main Vac valve opened
5/10/2010	11:15:16 AM	Recipe started at 11:15 AM
5/10/2010	11:15:16 AM	Helium valve closed
5/10/2010	11:15:16 AM	BCl3 valve closed
5/10/2010	11:15:16 AM	PH3 valve closed
5/10/2010	11:15:16 AM	SiCl4 pre valve closed
5/10/2010	11:15:16 AM	SiCl4 post valve closed
5/10/2010	11:15:16 AM	Main Vac valve closed
5/10/2010	11:15:16 AM	Bypass valve closed
5/10/2010	11:15:16 AM	Bubbler valve closed
5/10/2010	11:15:16 AM	H2 valve opened
5/10/2010	11:15:16 AM	Helium MFC set to  0.000000
5/10/2010	11:15:16 AM	H2 MFC set to  500.000000
5/10/2010	11:15:16 AM	BCl3 MFC set to  0.000000
5/10/2010	11:15:16 AM	SiCl4 MFC set to  0.000000
5/10/2010	11:15:16 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:15:16 AM	Tube furnace set to 0
5/10/2010	11:16:37 AM	Helium valve closed
5/10/2010	11:16:37 AM	BCl3 valve closed
5/10/2010	11:16:37 AM	PH3 valve closed
5/10/2010	11:16:37 AM	SiCl4 pre valve closed
5/10/2010	11:16:37 AM	SiCl4 post valve closed
5/10/2010	11:16:37 AM	Main Vac valve closed
5/10/2010	11:16:37 AM	Bypass valve closed
5/10/2010	11:16:37 AM	H2 valve opened
5/10/2010	11:16:37 AM	Bubbler valve opened
5/10/2010	11:16:37 AM	Helium MFC set to  0.000000
5/10/2010	11:16:37 AM	H2 MFC set to  500.000000
5/10/2010	11:16:37 AM	BCl3 MFC set to  0.000000
5/10/2010	11:16:37 AM	SiCl4 MFC set to  0.000000
5/10/2010	11:16:37 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:16:37 AM	Tube furnace set to 1000
5/10/2010	11:38:17 AM	Helium valve closed
5/10/2010	11:38:17 AM	PH3 valve closed
5/10/2010	11:38:17 AM	Main Vac valve closed
5/10/2010	11:38:17 AM	Bypass valve closed
5/10/2010	11:38:17 AM	H2 valve opened
5/10/2010	11:38:17 AM	BCl3 valve opened
5/10/2010	11:38:17 AM	SiCl4 pre valve opened
5/10/2010	11:38:17 AM	SiCl4 post valve opened
5/10/2010	11:38:17 AM	Bubbler valve opened
5/10/2010	11:38:17 AM	Helium MFC set to  0.000000
5/10/2010	11:38:17 AM	H2 MFC set to  500.000000
5/10/2010	11:38:17 AM	BCl3 MFC set to  40.000000
5/10/2010	11:38:17 AM	SiCl4 MFC set to  350.000000
5/10/2010	11:38:17 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:38:17 AM	Tube furnace set to 1000
5/10/2010	11:58:17 AM	H2 valve closed
5/10/2010	11:58:17 AM	BCl3 valve closed
5/10/2010	11:58:17 AM	PH3 valve closed
5/10/2010	11:58:17 AM	SiCl4 pre valve closed
5/10/2010	11:58:17 AM	SiCl4 post valve closed
5/10/2010	11:58:17 AM	Main Vac valve closed
5/10/2010	11:58:17 AM	Bypass valve closed
5/10/2010	11:58:17 AM	Helium valve opened
5/10/2010	11:58:17 AM	Bubbler valve opened
5/10/2010	11:58:17 AM	Helium MFC set to  500.000000
5/10/2010	11:58:17 AM	H2 MFC set to  0.000000
5/10/2010	11:58:17 AM	BCl3 MFC set to  0.000000
5/10/2010	11:58:17 AM	SiCl4 MFC set to  0.000000
5/10/2010	11:58:17 AM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:58:18 AM	Tube furnace set to 0
5/10/2010	12:18:18 PM	Helium valve closed
5/10/2010	12:18:18 PM	H2 valve closed
5/10/2010	12:18:18 PM	BCl3 valve closed
5/10/2010	12:18:18 PM	PH3 valve closed
5/10/2010	12:18:18 PM	SiCl4 pre valve closed
5/10/2010	12:18:18 PM	SiCl4 post valve closed
5/10/2010	12:18:18 PM	Main Vac valve closed
5/10/2010	12:18:18 PM	Bypass valve closed
5/10/2010	12:18:18 PM	Bubbler valve closed
5/10/2010	12:18:18 PM	Helium MFC set to  0.000000
5/10/2010	12:18:18 PM	H2 MFC set to  0.000000
5/10/2010	12:18:18 PM	BCl3 MFC set to  0.000000
5/10/2010	12:18:18 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:18:18 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:18:18 PM	Tube furnace set to 0
5/10/2010	12:18:18 PM	Run finished at 12:18 PM
5/10/2010	12:24:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2010	12:24:13 PM	Recipe started at 12:24 PM
5/10/2010	12:24:13 PM	Helium valve closed
5/10/2010	12:24:13 PM	H2 valve closed
5/10/2010	12:24:13 PM	BCl3 valve closed
5/10/2010	12:24:13 PM	PH3 valve closed
5/10/2010	12:24:13 PM	SiCl4 pre valve closed
5/10/2010	12:24:13 PM	SiCl4 post valve closed
5/10/2010	12:24:13 PM	Main Vac valve closed
5/10/2010	12:24:13 PM	Bubbler valve closed
5/10/2010	12:24:13 PM	Bypass valve opened
5/10/2010	12:24:13 PM	Helium MFC set to  0.000000
5/10/2010	12:24:13 PM	H2 MFC set to  0.000000
5/10/2010	12:24:13 PM	BCl3 MFC set to  0.000000
5/10/2010	12:24:13 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:24:13 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:24:13 PM	Tube furnace set to 0
5/10/2010	12:24:56 PM	Helium valve closed
5/10/2010	12:24:56 PM	H2 valve closed
5/10/2010	12:24:56 PM	BCl3 valve closed
5/10/2010	12:24:56 PM	PH3 valve closed
5/10/2010	12:24:56 PM	SiCl4 pre valve closed
5/10/2010	12:24:56 PM	SiCl4 post valve closed
5/10/2010	12:24:56 PM	Bubbler valve closed
5/10/2010	12:24:56 PM	Main Vac valve opened
5/10/2010	12:24:56 PM	Bypass valve opened
5/10/2010	12:24:56 PM	Helium MFC set to  0.000000
5/10/2010	12:24:56 PM	H2 MFC set to  0.000000
5/10/2010	12:24:56 PM	BCl3 MFC set to  0.000000
5/10/2010	12:24:56 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:24:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:24:56 PM	Tube furnace set to 0
5/10/2010	12:24:56 PM	Run finished at 12:24 PM
5/10/2010	12:24:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2010	12:25:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/10/2010	12:25:24 PM	Recipe started at 12:25 PM
5/10/2010	12:25:24 PM	H2 valve closed
5/10/2010	12:25:24 PM	BCl3 valve closed
5/10/2010	12:25:24 PM	PH3 valve closed
5/10/2010	12:25:24 PM	SiCl4 pre valve closed
5/10/2010	12:25:24 PM	SiCl4 post valve closed
5/10/2010	12:25:24 PM	Main Vac valve closed
5/10/2010	12:25:24 PM	Bypass valve closed
5/10/2010	12:25:24 PM	Bubbler valve closed
5/10/2010	12:25:24 PM	Helium valve opened
5/10/2010	12:25:24 PM	Helium MFC set to  500.000000
5/10/2010	12:25:24 PM	H2 MFC set to  0.000000
5/10/2010	12:25:24 PM	BCl3 MFC set to  0.000000
5/10/2010	12:25:24 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:25:24 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:25:24 PM	Tube furnace set to 0
5/10/2010	12:25:54 PM	Helium valve closed
5/10/2010	12:25:54 PM	H2 valve closed
5/10/2010	12:25:54 PM	BCl3 valve closed
5/10/2010	12:25:54 PM	PH3 valve closed
5/10/2010	12:25:54 PM	SiCl4 pre valve closed
5/10/2010	12:25:54 PM	SiCl4 post valve closed
5/10/2010	12:25:54 PM	Main Vac valve closed
5/10/2010	12:25:54 PM	Bypass valve closed
5/10/2010	12:25:54 PM	Bubbler valve closed
5/10/2010	12:25:54 PM	Helium MFC set to  0.000000
5/10/2010	12:25:54 PM	H2 MFC set to  0.000000
5/10/2010	12:25:54 PM	BCl3 MFC set to  0.000000
5/10/2010	12:25:54 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:25:54 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:25:54 PM	Tube furnace set to 0
5/10/2010	12:26:09 PM	Helium valve closed
5/10/2010	12:26:09 PM	H2 valve closed
5/10/2010	12:26:09 PM	BCl3 valve closed
5/10/2010	12:26:09 PM	PH3 valve closed
5/10/2010	12:26:09 PM	SiCl4 pre valve closed
5/10/2010	12:26:09 PM	SiCl4 post valve closed
5/10/2010	12:26:09 PM	Main Vac valve closed
5/10/2010	12:26:09 PM	Bubbler valve closed
5/10/2010	12:26:09 PM	Bypass valve opened
5/10/2010	12:26:09 PM	Helium MFC set to  0.000000
5/10/2010	12:26:09 PM	H2 MFC set to  0.000000
5/10/2010	12:26:09 PM	BCl3 MFC set to  0.000000
5/10/2010	12:26:09 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:26:09 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:26:09 PM	Tube furnace set to 0
5/10/2010	12:26:33 PM	Helium valve closed
5/10/2010	12:26:33 PM	H2 valve closed
5/10/2010	12:26:33 PM	BCl3 valve closed
5/10/2010	12:26:33 PM	PH3 valve closed
5/10/2010	12:26:33 PM	SiCl4 pre valve closed
5/10/2010	12:26:33 PM	SiCl4 post valve closed
5/10/2010	12:26:33 PM	Bubbler valve closed
5/10/2010	12:26:33 PM	Main Vac valve opened
5/10/2010	12:26:33 PM	Bypass valve opened
5/10/2010	12:26:33 PM	Helium MFC set to  0.000000
5/10/2010	12:26:33 PM	H2 MFC set to  0.000000
5/10/2010	12:26:33 PM	BCl3 MFC set to  0.000000
5/10/2010	12:26:33 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:26:33 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:26:33 PM	Tube furnace set to 0
5/10/2010	12:31:33 PM	H2 valve closed
5/10/2010	12:31:33 PM	BCl3 valve closed
5/10/2010	12:31:33 PM	PH3 valve closed
5/10/2010	12:31:33 PM	SiCl4 pre valve closed
5/10/2010	12:31:33 PM	SiCl4 post valve closed
5/10/2010	12:31:33 PM	Main Vac valve closed
5/10/2010	12:31:33 PM	Bypass valve closed
5/10/2010	12:31:33 PM	Bubbler valve closed
5/10/2010	12:31:33 PM	Helium valve opened
5/10/2010	12:31:33 PM	Helium MFC set to  500.000000
5/10/2010	12:31:33 PM	H2 MFC set to  0.000000
5/10/2010	12:31:33 PM	BCl3 MFC set to  0.000000
5/10/2010	12:31:33 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:31:33 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:31:33 PM	Tube furnace set to 0
5/10/2010	12:32:52 PM	Helium valve closed
5/10/2010	12:32:52 PM	H2 valve closed
5/10/2010	12:32:52 PM	BCl3 valve closed
5/10/2010	12:32:52 PM	PH3 valve closed
5/10/2010	12:32:52 PM	SiCl4 pre valve closed
5/10/2010	12:32:52 PM	SiCl4 post valve closed
5/10/2010	12:32:52 PM	Main Vac valve closed
5/10/2010	12:32:52 PM	Bypass valve closed
5/10/2010	12:32:52 PM	Bubbler valve closed
5/10/2010	12:32:52 PM	Helium MFC set to  0.000000
5/10/2010	12:32:52 PM	H2 MFC set to  0.000000
5/10/2010	12:32:52 PM	BCl3 MFC set to  0.000000
5/10/2010	12:32:52 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:32:52 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:32:52 PM	Tube furnace set to 0
5/10/2010	12:33:07 PM	Helium valve closed
5/10/2010	12:33:07 PM	H2 valve closed
5/10/2010	12:33:07 PM	BCl3 valve closed
5/10/2010	12:33:07 PM	PH3 valve closed
5/10/2010	12:33:07 PM	SiCl4 pre valve closed
5/10/2010	12:33:07 PM	SiCl4 post valve closed
5/10/2010	12:33:07 PM	Main Vac valve closed
5/10/2010	12:33:07 PM	Bubbler valve closed
5/10/2010	12:33:07 PM	Bypass valve opened
5/10/2010	12:33:07 PM	Helium MFC set to  0.000000
5/10/2010	12:33:07 PM	H2 MFC set to  0.000000
5/10/2010	12:33:07 PM	BCl3 MFC set to  0.000000
5/10/2010	12:33:07 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:33:07 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:33:07 PM	Tube furnace set to 0
5/10/2010	12:33:38 PM	Helium valve closed
5/10/2010	12:33:38 PM	H2 valve closed
5/10/2010	12:33:38 PM	BCl3 valve closed
5/10/2010	12:33:38 PM	PH3 valve closed
5/10/2010	12:33:38 PM	SiCl4 pre valve closed
5/10/2010	12:33:38 PM	SiCl4 post valve closed
5/10/2010	12:33:38 PM	Bubbler valve closed
5/10/2010	12:33:38 PM	Main Vac valve opened
5/10/2010	12:33:38 PM	Bypass valve opened
5/10/2010	12:33:38 PM	Helium MFC set to  0.000000
5/10/2010	12:33:38 PM	H2 MFC set to  0.000000
5/10/2010	12:33:38 PM	BCl3 MFC set to  0.000000
5/10/2010	12:33:38 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:33:38 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:33:38 PM	Tube furnace set to 0
5/10/2010	12:38:38 PM	H2 valve closed
5/10/2010	12:38:38 PM	BCl3 valve closed
5/10/2010	12:38:38 PM	PH3 valve closed
5/10/2010	12:38:38 PM	SiCl4 pre valve closed
5/10/2010	12:38:38 PM	SiCl4 post valve closed
5/10/2010	12:38:38 PM	Main Vac valve closed
5/10/2010	12:38:38 PM	Bypass valve closed
5/10/2010	12:38:38 PM	Bubbler valve closed
5/10/2010	12:38:38 PM	Helium valve opened
5/10/2010	12:38:38 PM	Helium MFC set to  500.000000
5/10/2010	12:38:38 PM	H2 MFC set to  0.000000
5/10/2010	12:38:38 PM	BCl3 MFC set to  0.000000
5/10/2010	12:38:38 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:38:38 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:38:38 PM	Tube furnace set to 0
5/10/2010	12:39:58 PM	Helium valve closed
5/10/2010	12:39:58 PM	H2 valve closed
5/10/2010	12:39:58 PM	BCl3 valve closed
5/10/2010	12:39:58 PM	PH3 valve closed
5/10/2010	12:39:58 PM	SiCl4 pre valve closed
5/10/2010	12:39:58 PM	SiCl4 post valve closed
5/10/2010	12:39:58 PM	Main Vac valve closed
5/10/2010	12:39:58 PM	Bypass valve closed
5/10/2010	12:39:58 PM	Bubbler valve closed
5/10/2010	12:39:58 PM	Helium MFC set to  0.000000
5/10/2010	12:39:58 PM	H2 MFC set to  0.000000
5/10/2010	12:39:58 PM	BCl3 MFC set to  0.000000
5/10/2010	12:39:58 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:39:58 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:39:58 PM	Tube furnace set to 0
5/10/2010	12:40:13 PM	Helium valve closed
5/10/2010	12:40:13 PM	H2 valve closed
5/10/2010	12:40:13 PM	BCl3 valve closed
5/10/2010	12:40:13 PM	PH3 valve closed
5/10/2010	12:40:13 PM	SiCl4 pre valve closed
5/10/2010	12:40:13 PM	SiCl4 post valve closed
5/10/2010	12:40:13 PM	Main Vac valve closed
5/10/2010	12:40:13 PM	Bubbler valve closed
5/10/2010	12:40:13 PM	Bypass valve opened
5/10/2010	12:40:13 PM	Helium MFC set to  0.000000
5/10/2010	12:40:13 PM	H2 MFC set to  0.000000
5/10/2010	12:40:13 PM	BCl3 MFC set to  0.000000
5/10/2010	12:40:13 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:40:13 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:40:14 PM	Tube furnace set to 0
5/10/2010	12:40:45 PM	Helium valve closed
5/10/2010	12:40:45 PM	H2 valve closed
5/10/2010	12:40:45 PM	BCl3 valve closed
5/10/2010	12:40:45 PM	PH3 valve closed
5/10/2010	12:40:45 PM	SiCl4 pre valve closed
5/10/2010	12:40:45 PM	SiCl4 post valve closed
5/10/2010	12:40:45 PM	Bubbler valve closed
5/10/2010	12:40:45 PM	Main Vac valve opened
5/10/2010	12:40:45 PM	Bypass valve opened
5/10/2010	12:40:45 PM	Helium MFC set to  0.000000
5/10/2010	12:40:45 PM	H2 MFC set to  0.000000
5/10/2010	12:40:45 PM	BCl3 MFC set to  0.000000
5/10/2010	12:40:45 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:40:45 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:40:45 PM	Tube furnace set to 0
5/10/2010	12:45:45 PM	Helium valve closed
5/10/2010	12:45:45 PM	H2 valve closed
5/10/2010	12:45:45 PM	BCl3 valve closed
5/10/2010	12:45:45 PM	PH3 valve closed
5/10/2010	12:45:45 PM	SiCl4 pre valve closed
5/10/2010	12:45:45 PM	SiCl4 post valve closed
5/10/2010	12:45:45 PM	Bubbler valve closed
5/10/2010	12:45:45 PM	Main Vac valve opened
5/10/2010	12:45:45 PM	Bypass valve opened
5/10/2010	12:45:45 PM	Helium MFC set to  0.000000
5/10/2010	12:45:45 PM	H2 MFC set to  0.000000
5/10/2010	12:45:45 PM	BCl3 MFC set to  0.000000
5/10/2010	12:45:45 PM	SiCl4 MFC set to  0.000000
5/10/2010	12:45:45 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	12:45:45 PM	Tube furnace set to 0
5/10/2010	12:45:46 PM	Run finished at 12:45 PM
5/10/2010	12:45:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/10/2010	1:02:29 PM	Main Vac valve closed
5/10/2010	1:02:31 PM	Bypass valve closed
5/10/2010	1:02:39 PM	Bypass valve opened
5/10/2010	1:04:01 PM	Main Vac valve opened
5/10/2010	1:04:09 PM	Recipe started at 1:04 PM
5/10/2010	1:04:09 PM	Helium valve closed
5/10/2010	1:04:09 PM	BCl3 valve closed
5/10/2010	1:04:09 PM	PH3 valve closed
5/10/2010	1:04:09 PM	SiCl4 pre valve closed
5/10/2010	1:04:09 PM	SiCl4 post valve closed
5/10/2010	1:04:09 PM	Main Vac valve closed
5/10/2010	1:04:09 PM	Bypass valve closed
5/10/2010	1:04:09 PM	Bubbler valve closed
5/10/2010	1:04:09 PM	H2 valve opened
5/10/2010	1:04:09 PM	Helium MFC set to  0.000000
5/10/2010	1:04:09 PM	H2 MFC set to  500.000000
5/10/2010	1:04:09 PM	BCl3 MFC set to  0.000000
5/10/2010	1:04:09 PM	SiCl4 MFC set to  0.000000
5/10/2010	1:04:09 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	1:04:09 PM	Tube furnace set to 0
5/10/2010	1:05:30 PM	Helium valve closed
5/10/2010	1:05:30 PM	BCl3 valve closed
5/10/2010	1:05:30 PM	PH3 valve closed
5/10/2010	1:05:30 PM	SiCl4 pre valve closed
5/10/2010	1:05:30 PM	SiCl4 post valve closed
5/10/2010	1:05:30 PM	Main Vac valve closed
5/10/2010	1:05:30 PM	Bypass valve closed
5/10/2010	1:05:30 PM	H2 valve opened
5/10/2010	1:05:30 PM	Bubbler valve opened
5/10/2010	1:05:30 PM	Helium MFC set to  0.000000
5/10/2010	1:05:30 PM	H2 MFC set to  500.000000
5/10/2010	1:05:30 PM	BCl3 MFC set to  0.000000
5/10/2010	1:05:30 PM	SiCl4 MFC set to  0.000000
5/10/2010	1:05:30 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	1:05:30 PM	Tube furnace set to 1000
5/10/2010	1:27:10 PM	Helium valve closed
5/10/2010	1:27:10 PM	PH3 valve closed
5/10/2010	1:27:10 PM	Main Vac valve closed
5/10/2010	1:27:10 PM	Bypass valve closed
5/10/2010	1:27:10 PM	H2 valve opened
5/10/2010	1:27:10 PM	BCl3 valve opened
5/10/2010	1:27:10 PM	SiCl4 pre valve opened
5/10/2010	1:27:10 PM	SiCl4 post valve opened
5/10/2010	1:27:10 PM	Bubbler valve opened
5/10/2010	1:27:10 PM	Helium MFC set to  0.000000
5/10/2010	1:27:10 PM	H2 MFC set to  475.000000
5/10/2010	1:27:10 PM	BCl3 MFC set to  40.000000
5/10/2010	1:27:10 PM	SiCl4 MFC set to  350.000000
5/10/2010	1:27:10 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	1:27:11 PM	Tube furnace set to 1000
5/10/2010	1:47:11 PM	H2 valve closed
5/10/2010	1:47:11 PM	BCl3 valve closed
5/10/2010	1:47:11 PM	PH3 valve closed
5/10/2010	1:47:11 PM	SiCl4 pre valve closed
5/10/2010	1:47:11 PM	SiCl4 post valve closed
5/10/2010	1:47:11 PM	Main Vac valve closed
5/10/2010	1:47:11 PM	Bypass valve closed
5/10/2010	1:47:11 PM	Helium valve opened
5/10/2010	1:47:11 PM	Bubbler valve opened
5/10/2010	1:47:11 PM	Helium MFC set to  500.000000
5/10/2010	1:47:11 PM	H2 MFC set to  0.000000
5/10/2010	1:47:11 PM	BCl3 MFC set to  0.000000
5/10/2010	1:47:11 PM	SiCl4 MFC set to  0.000000
5/10/2010	1:47:11 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	1:47:11 PM	Tube furnace set to 0
5/10/2010	2:07:11 PM	Helium valve closed
5/10/2010	2:07:11 PM	H2 valve closed
5/10/2010	2:07:11 PM	BCl3 valve closed
5/10/2010	2:07:11 PM	PH3 valve closed
5/10/2010	2:07:11 PM	SiCl4 pre valve closed
5/10/2010	2:07:11 PM	SiCl4 post valve closed
5/10/2010	2:07:11 PM	Main Vac valve closed
5/10/2010	2:07:11 PM	Bypass valve closed
5/10/2010	2:07:11 PM	Bubbler valve closed
5/10/2010	2:07:11 PM	Helium MFC set to  0.000000
5/10/2010	2:07:11 PM	H2 MFC set to  0.000000
5/10/2010	2:07:11 PM	BCl3 MFC set to  0.000000
5/10/2010	2:07:11 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:07:11 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:07:11 PM	Tube furnace set to 0
5/10/2010	2:07:11 PM	Run finished at 2:07 PM
5/10/2010	2:19:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2010	2:19:34 PM	Recipe started at 2:19 PM
5/10/2010	2:19:34 PM	H2 valve closed
5/10/2010	2:19:34 PM	BCl3 valve closed
5/10/2010	2:19:34 PM	PH3 valve closed
5/10/2010	2:19:34 PM	SiCl4 pre valve closed
5/10/2010	2:19:34 PM	SiCl4 post valve closed
5/10/2010	2:19:34 PM	Main Vac valve closed
5/10/2010	2:19:34 PM	Bypass valve closed
5/10/2010	2:19:34 PM	Bubbler valve closed
5/10/2010	2:19:34 PM	Helium valve opened
5/10/2010	2:19:34 PM	Helium MFC set to  500.000000
5/10/2010	2:19:34 PM	H2 MFC set to  0.000000
5/10/2010	2:19:34 PM	BCl3 MFC set to  0.000000
5/10/2010	2:19:34 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:19:34 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:19:34 PM	Tube furnace set to 0
5/10/2010	2:19:39 PM	Helium valve closed
5/10/2010	2:19:39 PM	H2 valve closed
5/10/2010	2:19:39 PM	BCl3 valve closed
5/10/2010	2:19:39 PM	PH3 valve closed
5/10/2010	2:19:39 PM	SiCl4 pre valve closed
5/10/2010	2:19:39 PM	SiCl4 post valve closed
5/10/2010	2:19:39 PM	Main Vac valve closed
5/10/2010	2:19:39 PM	Bypass valve closed
5/10/2010	2:19:39 PM	Bubbler valve closed
5/10/2010	2:19:39 PM	Helium MFC set to  0.000000
5/10/2010	2:19:39 PM	H2 MFC set to  0.000000
5/10/2010	2:19:39 PM	BCl3 MFC set to  0.000000
5/10/2010	2:19:39 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:19:39 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:19:39 PM	Tube furnace set to 0
5/10/2010	2:19:39 PM	Run finished at 2:19 PM
5/10/2010	2:19:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2010	2:22:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2010	2:22:55 PM	Recipe started at 2:22 PM
5/10/2010	2:22:55 PM	Helium valve closed
5/10/2010	2:22:55 PM	H2 valve closed
5/10/2010	2:22:55 PM	BCl3 valve closed
5/10/2010	2:22:55 PM	PH3 valve closed
5/10/2010	2:22:55 PM	SiCl4 pre valve closed
5/10/2010	2:22:55 PM	SiCl4 post valve closed
5/10/2010	2:22:55 PM	Main Vac valve closed
5/10/2010	2:22:55 PM	Bubbler valve closed
5/10/2010	2:22:55 PM	Bypass valve opened
5/10/2010	2:22:55 PM	Helium MFC set to  0.000000
5/10/2010	2:22:55 PM	H2 MFC set to  0.000000
5/10/2010	2:22:55 PM	BCl3 MFC set to  0.000000
5/10/2010	2:22:55 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:22:55 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:22:55 PM	Tube furnace set to 0
5/10/2010	2:23:39 PM	Helium valve closed
5/10/2010	2:23:39 PM	H2 valve closed
5/10/2010	2:23:39 PM	BCl3 valve closed
5/10/2010	2:23:39 PM	PH3 valve closed
5/10/2010	2:23:39 PM	SiCl4 pre valve closed
5/10/2010	2:23:39 PM	SiCl4 post valve closed
5/10/2010	2:23:39 PM	Bubbler valve closed
5/10/2010	2:23:39 PM	Main Vac valve opened
5/10/2010	2:23:39 PM	Bypass valve opened
5/10/2010	2:23:39 PM	Helium MFC set to  0.000000
5/10/2010	2:23:39 PM	H2 MFC set to  0.000000
5/10/2010	2:23:39 PM	BCl3 MFC set to  0.000000
5/10/2010	2:23:39 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:23:39 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:23:39 PM	Tube furnace set to 0
5/10/2010	2:23:40 PM	Run finished at 2:23 PM
5/10/2010	2:23:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2010	2:24:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/10/2010	2:24:40 PM	Recipe started at 2:24 PM
5/10/2010	2:24:40 PM	H2 valve closed
5/10/2010	2:24:40 PM	BCl3 valve closed
5/10/2010	2:24:40 PM	PH3 valve closed
5/10/2010	2:24:40 PM	SiCl4 pre valve closed
5/10/2010	2:24:40 PM	SiCl4 post valve closed
5/10/2010	2:24:40 PM	Main Vac valve closed
5/10/2010	2:24:40 PM	Bypass valve closed
5/10/2010	2:24:40 PM	Bubbler valve closed
5/10/2010	2:24:40 PM	Helium valve opened
5/10/2010	2:24:40 PM	Helium MFC set to  500.000000
5/10/2010	2:24:40 PM	H2 MFC set to  0.000000
5/10/2010	2:24:40 PM	BCl3 MFC set to  0.000000
5/10/2010	2:24:40 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:24:40 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:24:40 PM	Tube furnace set to 0
5/10/2010	2:24:52 PM	Helium valve closed
5/10/2010	2:24:52 PM	H2 valve closed
5/10/2010	2:24:52 PM	BCl3 valve closed
5/10/2010	2:24:52 PM	PH3 valve closed
5/10/2010	2:24:52 PM	SiCl4 pre valve closed
5/10/2010	2:24:52 PM	SiCl4 post valve closed
5/10/2010	2:24:52 PM	Main Vac valve closed
5/10/2010	2:24:52 PM	Bypass valve closed
5/10/2010	2:24:52 PM	Bubbler valve closed
5/10/2010	2:24:52 PM	Helium MFC set to  0.000000
5/10/2010	2:24:52 PM	H2 MFC set to  0.000000
5/10/2010	2:24:52 PM	BCl3 MFC set to  0.000000
5/10/2010	2:24:52 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:24:52 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:24:52 PM	Tube furnace set to 0
5/10/2010	2:25:07 PM	Helium valve closed
5/10/2010	2:25:07 PM	H2 valve closed
5/10/2010	2:25:07 PM	BCl3 valve closed
5/10/2010	2:25:07 PM	PH3 valve closed
5/10/2010	2:25:07 PM	SiCl4 pre valve closed
5/10/2010	2:25:07 PM	SiCl4 post valve closed
5/10/2010	2:25:07 PM	Main Vac valve closed
5/10/2010	2:25:07 PM	Bubbler valve closed
5/10/2010	2:25:07 PM	Bypass valve opened
5/10/2010	2:25:07 PM	Helium MFC set to  0.000000
5/10/2010	2:25:07 PM	H2 MFC set to  0.000000
5/10/2010	2:25:07 PM	BCl3 MFC set to  0.000000
5/10/2010	2:25:07 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:25:07 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:25:08 PM	Tube furnace set to 0
5/10/2010	2:25:21 PM	Helium valve closed
5/10/2010	2:25:21 PM	H2 valve closed
5/10/2010	2:25:21 PM	BCl3 valve closed
5/10/2010	2:25:21 PM	PH3 valve closed
5/10/2010	2:25:21 PM	SiCl4 pre valve closed
5/10/2010	2:25:21 PM	SiCl4 post valve closed
5/10/2010	2:25:21 PM	Bubbler valve closed
5/10/2010	2:25:21 PM	Main Vac valve opened
5/10/2010	2:25:21 PM	Bypass valve opened
5/10/2010	2:25:21 PM	Helium MFC set to  0.000000
5/10/2010	2:25:21 PM	H2 MFC set to  0.000000
5/10/2010	2:25:21 PM	BCl3 MFC set to  0.000000
5/10/2010	2:25:21 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:25:21 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:25:21 PM	Tube furnace set to 0
5/10/2010	2:28:48 PM	H2 valve closed
5/10/2010	2:28:48 PM	BCl3 valve closed
5/10/2010	2:28:48 PM	PH3 valve closed
5/10/2010	2:28:48 PM	SiCl4 pre valve closed
5/10/2010	2:28:48 PM	SiCl4 post valve closed
5/10/2010	2:28:48 PM	Main Vac valve closed
5/10/2010	2:28:48 PM	Bypass valve closed
5/10/2010	2:28:48 PM	Bubbler valve closed
5/10/2010	2:28:48 PM	Helium valve opened
5/10/2010	2:28:48 PM	Helium MFC set to  500.000000
5/10/2010	2:28:48 PM	H2 MFC set to  0.000000
5/10/2010	2:28:48 PM	BCl3 MFC set to  0.000000
5/10/2010	2:28:48 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:28:48 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:28:48 PM	Tube furnace set to 0
5/10/2010	2:30:08 PM	Helium valve closed
5/10/2010	2:30:08 PM	H2 valve closed
5/10/2010	2:30:08 PM	BCl3 valve closed
5/10/2010	2:30:08 PM	PH3 valve closed
5/10/2010	2:30:08 PM	SiCl4 pre valve closed
5/10/2010	2:30:08 PM	SiCl4 post valve closed
5/10/2010	2:30:08 PM	Main Vac valve closed
5/10/2010	2:30:08 PM	Bypass valve closed
5/10/2010	2:30:08 PM	Bubbler valve closed
5/10/2010	2:30:08 PM	Helium MFC set to  0.000000
5/10/2010	2:30:08 PM	H2 MFC set to  0.000000
5/10/2010	2:30:08 PM	BCl3 MFC set to  0.000000
5/10/2010	2:30:08 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:30:08 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:30:08 PM	Tube furnace set to 0
5/10/2010	2:30:23 PM	Helium valve closed
5/10/2010	2:30:23 PM	H2 valve closed
5/10/2010	2:30:23 PM	BCl3 valve closed
5/10/2010	2:30:23 PM	PH3 valve closed
5/10/2010	2:30:23 PM	SiCl4 pre valve closed
5/10/2010	2:30:23 PM	SiCl4 post valve closed
5/10/2010	2:30:23 PM	Main Vac valve closed
5/10/2010	2:30:23 PM	Bubbler valve closed
5/10/2010	2:30:23 PM	Bypass valve opened
5/10/2010	2:30:23 PM	Helium MFC set to  0.000000
5/10/2010	2:30:23 PM	H2 MFC set to  0.000000
5/10/2010	2:30:23 PM	BCl3 MFC set to  0.000000
5/10/2010	2:30:23 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:30:23 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:30:23 PM	Tube furnace set to 0
5/10/2010	2:30:55 PM	Helium valve closed
5/10/2010	2:30:55 PM	H2 valve closed
5/10/2010	2:30:55 PM	BCl3 valve closed
5/10/2010	2:30:55 PM	PH3 valve closed
5/10/2010	2:30:55 PM	SiCl4 pre valve closed
5/10/2010	2:30:55 PM	SiCl4 post valve closed
5/10/2010	2:30:55 PM	Bubbler valve closed
5/10/2010	2:30:55 PM	Main Vac valve opened
5/10/2010	2:30:55 PM	Bypass valve opened
5/10/2010	2:30:55 PM	Helium MFC set to  0.000000
5/10/2010	2:30:55 PM	H2 MFC set to  0.000000
5/10/2010	2:30:55 PM	BCl3 MFC set to  0.000000
5/10/2010	2:30:55 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:30:55 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:30:55 PM	Tube furnace set to 0
5/10/2010	2:35:55 PM	H2 valve closed
5/10/2010	2:35:55 PM	BCl3 valve closed
5/10/2010	2:35:55 PM	PH3 valve closed
5/10/2010	2:35:55 PM	SiCl4 pre valve closed
5/10/2010	2:35:55 PM	SiCl4 post valve closed
5/10/2010	2:35:55 PM	Main Vac valve closed
5/10/2010	2:35:55 PM	Bypass valve closed
5/10/2010	2:35:55 PM	Bubbler valve closed
5/10/2010	2:35:55 PM	Helium valve opened
5/10/2010	2:35:55 PM	Helium MFC set to  500.000000
5/10/2010	2:35:55 PM	H2 MFC set to  0.000000
5/10/2010	2:35:55 PM	BCl3 MFC set to  0.000000
5/10/2010	2:35:55 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:35:55 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:35:55 PM	Tube furnace set to 0
5/10/2010	2:37:16 PM	Helium valve closed
5/10/2010	2:37:16 PM	H2 valve closed
5/10/2010	2:37:16 PM	BCl3 valve closed
5/10/2010	2:37:16 PM	PH3 valve closed
5/10/2010	2:37:16 PM	SiCl4 pre valve closed
5/10/2010	2:37:16 PM	SiCl4 post valve closed
5/10/2010	2:37:16 PM	Main Vac valve closed
5/10/2010	2:37:16 PM	Bypass valve closed
5/10/2010	2:37:16 PM	Bubbler valve closed
5/10/2010	2:37:16 PM	Helium MFC set to  0.000000
5/10/2010	2:37:16 PM	H2 MFC set to  0.000000
5/10/2010	2:37:16 PM	BCl3 MFC set to  0.000000
5/10/2010	2:37:16 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:37:16 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:37:16 PM	Tube furnace set to 0
5/10/2010	2:37:31 PM	Helium valve closed
5/10/2010	2:37:31 PM	H2 valve closed
5/10/2010	2:37:31 PM	BCl3 valve closed
5/10/2010	2:37:31 PM	PH3 valve closed
5/10/2010	2:37:31 PM	SiCl4 pre valve closed
5/10/2010	2:37:31 PM	SiCl4 post valve closed
5/10/2010	2:37:31 PM	Main Vac valve closed
5/10/2010	2:37:31 PM	Bubbler valve closed
5/10/2010	2:37:31 PM	Bypass valve opened
5/10/2010	2:37:31 PM	Helium MFC set to  0.000000
5/10/2010	2:37:31 PM	H2 MFC set to  0.000000
5/10/2010	2:37:31 PM	BCl3 MFC set to  0.000000
5/10/2010	2:37:31 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:37:31 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:37:31 PM	Tube furnace set to 0
5/10/2010	2:38:02 PM	Helium valve closed
5/10/2010	2:38:02 PM	H2 valve closed
5/10/2010	2:38:02 PM	BCl3 valve closed
5/10/2010	2:38:02 PM	PH3 valve closed
5/10/2010	2:38:02 PM	SiCl4 pre valve closed
5/10/2010	2:38:02 PM	SiCl4 post valve closed
5/10/2010	2:38:02 PM	Bubbler valve closed
5/10/2010	2:38:02 PM	Main Vac valve opened
5/10/2010	2:38:02 PM	Bypass valve opened
5/10/2010	2:38:02 PM	Helium MFC set to  0.000000
5/10/2010	2:38:02 PM	H2 MFC set to  0.000000
5/10/2010	2:38:02 PM	BCl3 MFC set to  0.000000
5/10/2010	2:38:02 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:38:02 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:38:02 PM	Tube furnace set to 0
5/10/2010	2:41:45 PM	Helium valve closed
5/10/2010	2:41:45 PM	H2 valve closed
5/10/2010	2:41:45 PM	BCl3 valve closed
5/10/2010	2:41:45 PM	PH3 valve closed
5/10/2010	2:41:45 PM	SiCl4 pre valve closed
5/10/2010	2:41:45 PM	SiCl4 post valve closed
5/10/2010	2:41:45 PM	Bubbler valve closed
5/10/2010	2:41:45 PM	Main Vac valve opened
5/10/2010	2:41:45 PM	Bypass valve opened
5/10/2010	2:41:45 PM	Helium MFC set to  0.000000
5/10/2010	2:41:45 PM	H2 MFC set to  0.000000
5/10/2010	2:41:45 PM	BCl3 MFC set to  0.000000
5/10/2010	2:41:45 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:41:45 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:41:45 PM	Tube furnace set to 0
5/10/2010	2:41:46 PM	Run finished at 2:41 PM
5/10/2010	2:41:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/10/2010	2:42:03 PM	Main Vac valve closed
5/10/2010	2:42:05 PM	Bypass valve closed
5/10/2010	2:42:17 PM	Bypass valve opened
5/10/2010	2:42:18 PM	Main Vac valve opened
5/10/2010	2:43:00 PM	Recipe started at 2:42 PM
5/10/2010	2:43:00 PM	Helium valve closed
5/10/2010	2:43:00 PM	BCl3 valve closed
5/10/2010	2:43:00 PM	PH3 valve closed
5/10/2010	2:43:00 PM	SiCl4 pre valve closed
5/10/2010	2:43:00 PM	SiCl4 post valve closed
5/10/2010	2:43:00 PM	Main Vac valve closed
5/10/2010	2:43:00 PM	Bypass valve closed
5/10/2010	2:43:00 PM	Bubbler valve closed
5/10/2010	2:43:00 PM	H2 valve opened
5/10/2010	2:43:00 PM	Helium MFC set to  0.000000
5/10/2010	2:43:00 PM	H2 MFC set to  500.000000
5/10/2010	2:43:00 PM	BCl3 MFC set to  0.000000
5/10/2010	2:43:00 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:43:00 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:43:00 PM	Tube furnace set to 0
5/10/2010	2:43:45 PM	Run aborted at 2:43 PM
5/10/2010	2:43:45 PM	Helium valve closed
5/10/2010	2:43:45 PM	H2 valve closed
5/10/2010	2:43:45 PM	BCl3 valve closed
5/10/2010	2:43:45 PM	PH3 valve closed
5/10/2010	2:43:45 PM	SiCl4 pre valve closed
5/10/2010	2:43:45 PM	SiCl4 post valve closed
5/10/2010	2:43:45 PM	Bypass valve closed
5/10/2010	2:43:45 PM	Main Vac valve closed
5/10/2010	2:43:45 PM	Bubbler valve closed
5/10/2010	2:43:45 PM	Helium MFC set to  0.000000
5/10/2010	2:43:45 PM	H2 MFC set to  0.000000
5/10/2010	2:43:45 PM	BCl3 MFC set to  0.000000
5/10/2010	2:43:45 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:43:45 PM	Tube furnace set to 0
5/10/2010	2:44:01 PM	Recipe started at 2:44 PM
5/10/2010	2:44:01 PM	Helium valve closed
5/10/2010	2:44:01 PM	BCl3 valve closed
5/10/2010	2:44:01 PM	PH3 valve closed
5/10/2010	2:44:01 PM	SiCl4 pre valve closed
5/10/2010	2:44:01 PM	SiCl4 post valve closed
5/10/2010	2:44:01 PM	Main Vac valve closed
5/10/2010	2:44:01 PM	Bypass valve closed
5/10/2010	2:44:01 PM	Bubbler valve closed
5/10/2010	2:44:01 PM	H2 valve opened
5/10/2010	2:44:01 PM	Helium MFC set to  0.000000
5/10/2010	2:44:01 PM	H2 MFC set to  500.000000
5/10/2010	2:44:01 PM	BCl3 MFC set to  0.000000
5/10/2010	2:44:01 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:44:01 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:44:01 PM	Tube furnace set to 0
5/10/2010	2:44:36 PM	Helium valve closed
5/10/2010	2:44:36 PM	BCl3 valve closed
5/10/2010	2:44:36 PM	PH3 valve closed
5/10/2010	2:44:36 PM	SiCl4 pre valve closed
5/10/2010	2:44:36 PM	SiCl4 post valve closed
5/10/2010	2:44:36 PM	Main Vac valve closed
5/10/2010	2:44:36 PM	Bypass valve closed
5/10/2010	2:44:36 PM	H2 valve opened
5/10/2010	2:44:36 PM	Bubbler valve opened
5/10/2010	2:44:36 PM	Helium MFC set to  0.000000
5/10/2010	2:44:36 PM	H2 MFC set to  500.000000
5/10/2010	2:44:36 PM	BCl3 MFC set to  0.000000
5/10/2010	2:44:36 PM	SiCl4 MFC set to  0.000000
5/10/2010	2:44:36 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	2:44:37 PM	Tube furnace set to 1000
5/10/2010	3:06:17 PM	Helium valve closed
5/10/2010	3:06:17 PM	PH3 valve closed
5/10/2010	3:06:17 PM	Main Vac valve closed
5/10/2010	3:06:17 PM	Bypass valve closed
5/10/2010	3:06:17 PM	H2 valve opened
5/10/2010	3:06:17 PM	BCl3 valve opened
5/10/2010	3:06:17 PM	SiCl4 pre valve opened
5/10/2010	3:06:17 PM	SiCl4 post valve opened
5/10/2010	3:06:17 PM	Bubbler valve opened
5/10/2010	3:06:17 PM	Helium MFC set to  0.000000
5/10/2010	3:06:17 PM	H2 MFC set to  475.000000
5/10/2010	3:06:17 PM	BCl3 MFC set to  35.000000
5/10/2010	3:06:17 PM	SiCl4 MFC set to  350.000000
5/10/2010	3:06:17 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	3:06:17 PM	Tube furnace set to 1000
5/10/2010	3:36:17 PM	H2 valve closed
5/10/2010	3:36:17 PM	BCl3 valve closed
5/10/2010	3:36:17 PM	PH3 valve closed
5/10/2010	3:36:17 PM	SiCl4 pre valve closed
5/10/2010	3:36:17 PM	SiCl4 post valve closed
5/10/2010	3:36:17 PM	Main Vac valve closed
5/10/2010	3:36:17 PM	Bypass valve closed
5/10/2010	3:36:17 PM	Helium valve opened
5/10/2010	3:36:17 PM	Bubbler valve opened
5/10/2010	3:36:17 PM	Helium MFC set to  500.000000
5/10/2010	3:36:17 PM	H2 MFC set to  0.000000
5/10/2010	3:36:17 PM	BCl3 MFC set to  0.000000
5/10/2010	3:36:17 PM	SiCl4 MFC set to  0.000000
5/10/2010	3:36:17 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	3:36:17 PM	Tube furnace set to 0
5/10/2010	3:56:17 PM	Helium valve closed
5/10/2010	3:56:17 PM	H2 valve closed
5/10/2010	3:56:17 PM	BCl3 valve closed
5/10/2010	3:56:17 PM	PH3 valve closed
5/10/2010	3:56:17 PM	SiCl4 pre valve closed
5/10/2010	3:56:17 PM	SiCl4 post valve closed
5/10/2010	3:56:17 PM	Main Vac valve closed
5/10/2010	3:56:17 PM	Bypass valve closed
5/10/2010	3:56:17 PM	Bubbler valve closed
5/10/2010	3:56:17 PM	Helium MFC set to  0.000000
5/10/2010	3:56:17 PM	H2 MFC set to  0.000000
5/10/2010	3:56:17 PM	BCl3 MFC set to  0.000000
5/10/2010	3:56:17 PM	SiCl4 MFC set to  0.000000
5/10/2010	3:56:17 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	3:56:17 PM	Tube furnace set to 0
5/10/2010	3:56:17 PM	Run finished at 3:56 PM
5/10/2010	4:13:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2010	4:13:34 PM	Recipe started at 4:13 PM
5/10/2010	4:13:34 PM	Helium valve closed
5/10/2010	4:13:34 PM	H2 valve closed
5/10/2010	4:13:34 PM	BCl3 valve closed
5/10/2010	4:13:34 PM	PH3 valve closed
5/10/2010	4:13:34 PM	SiCl4 pre valve closed
5/10/2010	4:13:34 PM	SiCl4 post valve closed
5/10/2010	4:13:34 PM	Main Vac valve closed
5/10/2010	4:13:34 PM	Bubbler valve closed
5/10/2010	4:13:34 PM	Bypass valve opened
5/10/2010	4:13:34 PM	Helium MFC set to  0.000000
5/10/2010	4:13:34 PM	H2 MFC set to  0.000000
5/10/2010	4:13:34 PM	BCl3 MFC set to  0.000000
5/10/2010	4:13:34 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:13:34 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:13:34 PM	Tube furnace set to 0
5/10/2010	4:14:19 PM	Helium valve closed
5/10/2010	4:14:19 PM	H2 valve closed
5/10/2010	4:14:19 PM	BCl3 valve closed
5/10/2010	4:14:19 PM	PH3 valve closed
5/10/2010	4:14:19 PM	SiCl4 pre valve closed
5/10/2010	4:14:19 PM	SiCl4 post valve closed
5/10/2010	4:14:19 PM	Bubbler valve closed
5/10/2010	4:14:19 PM	Main Vac valve opened
5/10/2010	4:14:19 PM	Bypass valve opened
5/10/2010	4:14:19 PM	Helium MFC set to  0.000000
5/10/2010	4:14:19 PM	H2 MFC set to  0.000000
5/10/2010	4:14:19 PM	BCl3 MFC set to  0.000000
5/10/2010	4:14:19 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:14:19 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:14:19 PM	Tube furnace set to 0
5/10/2010	4:14:19 PM	Run finished at 4:14 PM
5/10/2010	4:14:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2010	4:14:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/10/2010	4:14:44 PM	Recipe started at 4:14 PM
5/10/2010	4:14:44 PM	H2 valve closed
5/10/2010	4:14:44 PM	BCl3 valve closed
5/10/2010	4:14:44 PM	PH3 valve closed
5/10/2010	4:14:44 PM	SiCl4 pre valve closed
5/10/2010	4:14:44 PM	SiCl4 post valve closed
5/10/2010	4:14:44 PM	Main Vac valve closed
5/10/2010	4:14:44 PM	Bypass valve closed
5/10/2010	4:14:44 PM	Bubbler valve closed
5/10/2010	4:14:44 PM	Helium valve opened
5/10/2010	4:14:44 PM	Helium MFC set to  500.000000
5/10/2010	4:14:44 PM	H2 MFC set to  0.000000
5/10/2010	4:14:44 PM	BCl3 MFC set to  0.000000
5/10/2010	4:14:44 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:14:44 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:14:44 PM	Tube furnace set to 0
5/10/2010	4:14:56 PM	Helium valve closed
5/10/2010	4:14:56 PM	H2 valve closed
5/10/2010	4:14:56 PM	BCl3 valve closed
5/10/2010	4:14:56 PM	PH3 valve closed
5/10/2010	4:14:56 PM	SiCl4 pre valve closed
5/10/2010	4:14:56 PM	SiCl4 post valve closed
5/10/2010	4:14:56 PM	Main Vac valve closed
5/10/2010	4:14:56 PM	Bypass valve closed
5/10/2010	4:14:56 PM	Bubbler valve closed
5/10/2010	4:14:56 PM	Helium MFC set to  0.000000
5/10/2010	4:14:56 PM	H2 MFC set to  0.000000
5/10/2010	4:14:56 PM	BCl3 MFC set to  0.000000
5/10/2010	4:14:56 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:14:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:14:56 PM	Tube furnace set to 0
5/10/2010	4:15:11 PM	Helium valve closed
5/10/2010	4:15:11 PM	H2 valve closed
5/10/2010	4:15:11 PM	BCl3 valve closed
5/10/2010	4:15:11 PM	PH3 valve closed
5/10/2010	4:15:11 PM	SiCl4 pre valve closed
5/10/2010	4:15:11 PM	SiCl4 post valve closed
5/10/2010	4:15:11 PM	Main Vac valve closed
5/10/2010	4:15:11 PM	Bubbler valve closed
5/10/2010	4:15:11 PM	Bypass valve opened
5/10/2010	4:15:11 PM	Helium MFC set to  0.000000
5/10/2010	4:15:11 PM	H2 MFC set to  0.000000
5/10/2010	4:15:11 PM	BCl3 MFC set to  0.000000
5/10/2010	4:15:11 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:15:11 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:15:11 PM	Tube furnace set to 0
5/10/2010	4:15:25 PM	Helium valve closed
5/10/2010	4:15:25 PM	H2 valve closed
5/10/2010	4:15:25 PM	BCl3 valve closed
5/10/2010	4:15:25 PM	PH3 valve closed
5/10/2010	4:15:25 PM	SiCl4 pre valve closed
5/10/2010	4:15:25 PM	SiCl4 post valve closed
5/10/2010	4:15:25 PM	Bubbler valve closed
5/10/2010	4:15:25 PM	Main Vac valve opened
5/10/2010	4:15:25 PM	Bypass valve opened
5/10/2010	4:15:25 PM	Helium MFC set to  0.000000
5/10/2010	4:15:25 PM	H2 MFC set to  0.000000
5/10/2010	4:15:25 PM	BCl3 MFC set to  0.000000
5/10/2010	4:15:25 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:15:25 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:15:25 PM	Tube furnace set to 0
5/10/2010	4:20:25 PM	H2 valve closed
5/10/2010	4:20:25 PM	BCl3 valve closed
5/10/2010	4:20:25 PM	PH3 valve closed
5/10/2010	4:20:25 PM	SiCl4 pre valve closed
5/10/2010	4:20:25 PM	SiCl4 post valve closed
5/10/2010	4:20:25 PM	Main Vac valve closed
5/10/2010	4:20:25 PM	Bypass valve closed
5/10/2010	4:20:25 PM	Bubbler valve closed
5/10/2010	4:20:25 PM	Helium valve opened
5/10/2010	4:20:25 PM	Helium MFC set to  500.000000
5/10/2010	4:20:25 PM	H2 MFC set to  0.000000
5/10/2010	4:20:25 PM	BCl3 MFC set to  0.000000
5/10/2010	4:20:25 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:20:25 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:20:25 PM	Tube furnace set to 0
5/10/2010	4:21:41 PM	Helium valve closed
5/10/2010	4:21:41 PM	H2 valve closed
5/10/2010	4:21:41 PM	BCl3 valve closed
5/10/2010	4:21:41 PM	PH3 valve closed
5/10/2010	4:21:41 PM	SiCl4 pre valve closed
5/10/2010	4:21:41 PM	SiCl4 post valve closed
5/10/2010	4:21:41 PM	Main Vac valve closed
5/10/2010	4:21:41 PM	Bypass valve closed
5/10/2010	4:21:41 PM	Bubbler valve closed
5/10/2010	4:21:41 PM	Helium MFC set to  0.000000
5/10/2010	4:21:41 PM	H2 MFC set to  0.000000
5/10/2010	4:21:41 PM	BCl3 MFC set to  0.000000
5/10/2010	4:21:41 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:21:41 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:21:41 PM	Tube furnace set to 0
5/10/2010	4:21:56 PM	Helium valve closed
5/10/2010	4:21:56 PM	H2 valve closed
5/10/2010	4:21:56 PM	BCl3 valve closed
5/10/2010	4:21:56 PM	PH3 valve closed
5/10/2010	4:21:56 PM	SiCl4 pre valve closed
5/10/2010	4:21:56 PM	SiCl4 post valve closed
5/10/2010	4:21:56 PM	Main Vac valve closed
5/10/2010	4:21:56 PM	Bubbler valve closed
5/10/2010	4:21:56 PM	Bypass valve opened
5/10/2010	4:21:56 PM	Helium MFC set to  0.000000
5/10/2010	4:21:56 PM	H2 MFC set to  0.000000
5/10/2010	4:21:56 PM	BCl3 MFC set to  0.000000
5/10/2010	4:21:56 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:21:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:21:57 PM	Tube furnace set to 0
5/10/2010	4:22:27 PM	Helium valve closed
5/10/2010	4:22:27 PM	H2 valve closed
5/10/2010	4:22:27 PM	BCl3 valve closed
5/10/2010	4:22:27 PM	PH3 valve closed
5/10/2010	4:22:27 PM	SiCl4 pre valve closed
5/10/2010	4:22:27 PM	SiCl4 post valve closed
5/10/2010	4:22:27 PM	Bubbler valve closed
5/10/2010	4:22:27 PM	Main Vac valve opened
5/10/2010	4:22:27 PM	Bypass valve opened
5/10/2010	4:22:27 PM	Helium MFC set to  0.000000
5/10/2010	4:22:27 PM	H2 MFC set to  0.000000
5/10/2010	4:22:27 PM	BCl3 MFC set to  0.000000
5/10/2010	4:22:27 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:22:27 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:22:27 PM	Tube furnace set to 0
5/10/2010	4:27:27 PM	H2 valve closed
5/10/2010	4:27:27 PM	BCl3 valve closed
5/10/2010	4:27:27 PM	PH3 valve closed
5/10/2010	4:27:27 PM	SiCl4 pre valve closed
5/10/2010	4:27:27 PM	SiCl4 post valve closed
5/10/2010	4:27:27 PM	Main Vac valve closed
5/10/2010	4:27:27 PM	Bypass valve closed
5/10/2010	4:27:27 PM	Bubbler valve closed
5/10/2010	4:27:27 PM	Helium valve opened
5/10/2010	4:27:27 PM	Helium MFC set to  500.000000
5/10/2010	4:27:27 PM	H2 MFC set to  0.000000
5/10/2010	4:27:27 PM	BCl3 MFC set to  0.000000
5/10/2010	4:27:27 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:27:27 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:27:28 PM	Tube furnace set to 0
5/10/2010	4:28:48 PM	Helium valve closed
5/10/2010	4:28:48 PM	H2 valve closed
5/10/2010	4:28:48 PM	BCl3 valve closed
5/10/2010	4:28:48 PM	PH3 valve closed
5/10/2010	4:28:48 PM	SiCl4 pre valve closed
5/10/2010	4:28:48 PM	SiCl4 post valve closed
5/10/2010	4:28:48 PM	Main Vac valve closed
5/10/2010	4:28:48 PM	Bypass valve closed
5/10/2010	4:28:48 PM	Bubbler valve closed
5/10/2010	4:28:48 PM	Helium MFC set to  0.000000
5/10/2010	4:28:48 PM	H2 MFC set to  0.000000
5/10/2010	4:28:48 PM	BCl3 MFC set to  0.000000
5/10/2010	4:28:48 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:28:48 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:28:48 PM	Tube furnace set to 0
5/10/2010	4:29:03 PM	Helium valve closed
5/10/2010	4:29:03 PM	H2 valve closed
5/10/2010	4:29:03 PM	BCl3 valve closed
5/10/2010	4:29:03 PM	PH3 valve closed
5/10/2010	4:29:03 PM	SiCl4 pre valve closed
5/10/2010	4:29:03 PM	SiCl4 post valve closed
5/10/2010	4:29:03 PM	Main Vac valve closed
5/10/2010	4:29:03 PM	Bubbler valve closed
5/10/2010	4:29:03 PM	Bypass valve opened
5/10/2010	4:29:03 PM	Helium MFC set to  0.000000
5/10/2010	4:29:03 PM	H2 MFC set to  0.000000
5/10/2010	4:29:03 PM	BCl3 MFC set to  0.000000
5/10/2010	4:29:03 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:29:03 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:29:03 PM	Tube furnace set to 0
5/10/2010	4:29:35 PM	Helium valve closed
5/10/2010	4:29:35 PM	H2 valve closed
5/10/2010	4:29:35 PM	BCl3 valve closed
5/10/2010	4:29:35 PM	PH3 valve closed
5/10/2010	4:29:35 PM	SiCl4 pre valve closed
5/10/2010	4:29:35 PM	SiCl4 post valve closed
5/10/2010	4:29:35 PM	Bubbler valve closed
5/10/2010	4:29:35 PM	Main Vac valve opened
5/10/2010	4:29:35 PM	Bypass valve opened
5/10/2010	4:29:35 PM	Helium MFC set to  0.000000
5/10/2010	4:29:35 PM	H2 MFC set to  0.000000
5/10/2010	4:29:35 PM	BCl3 MFC set to  0.000000
5/10/2010	4:29:35 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:29:35 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:29:35 PM	Tube furnace set to 0
5/10/2010	4:33:53 PM	Helium valve closed
5/10/2010	4:33:53 PM	H2 valve closed
5/10/2010	4:33:53 PM	BCl3 valve closed
5/10/2010	4:33:53 PM	PH3 valve closed
5/10/2010	4:33:53 PM	SiCl4 pre valve closed
5/10/2010	4:33:53 PM	SiCl4 post valve closed
5/10/2010	4:33:53 PM	Bubbler valve closed
5/10/2010	4:33:53 PM	Main Vac valve opened
5/10/2010	4:33:53 PM	Bypass valve opened
5/10/2010	4:33:53 PM	Helium MFC set to  0.000000
5/10/2010	4:33:53 PM	H2 MFC set to  0.000000
5/10/2010	4:33:53 PM	BCl3 MFC set to  0.000000
5/10/2010	4:33:53 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:33:53 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:33:53 PM	Tube furnace set to 0
5/10/2010	4:33:54 PM	Run finished at 4:33 PM
5/10/2010	4:33:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/10/2010	4:34:41 PM	Main Vac valve closed
5/10/2010	4:34:43 PM	Bypass valve closed
5/10/2010	4:34:53 PM	Bypass valve opened
5/10/2010	4:34:54 PM	Main Vac valve opened
5/10/2010	4:35:00 PM	Recipe started at 4:34 PM
5/10/2010	4:35:00 PM	Helium valve closed
5/10/2010	4:35:00 PM	BCl3 valve closed
5/10/2010	4:35:00 PM	PH3 valve closed
5/10/2010	4:35:00 PM	SiCl4 pre valve closed
5/10/2010	4:35:00 PM	SiCl4 post valve closed
5/10/2010	4:35:00 PM	Main Vac valve closed
5/10/2010	4:35:00 PM	Bypass valve closed
5/10/2010	4:35:00 PM	Bubbler valve closed
5/10/2010	4:35:00 PM	H2 valve opened
5/10/2010	4:35:00 PM	Helium MFC set to  0.000000
5/10/2010	4:35:00 PM	H2 MFC set to  500.000000
5/10/2010	4:35:00 PM	BCl3 MFC set to  0.000000
5/10/2010	4:35:00 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:35:00 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:35:00 PM	Tube furnace set to 0
5/10/2010	4:36:20 PM	Helium valve closed
5/10/2010	4:36:20 PM	BCl3 valve closed
5/10/2010	4:36:20 PM	PH3 valve closed
5/10/2010	4:36:20 PM	SiCl4 pre valve closed
5/10/2010	4:36:20 PM	SiCl4 post valve closed
5/10/2010	4:36:20 PM	Main Vac valve closed
5/10/2010	4:36:20 PM	Bypass valve closed
5/10/2010	4:36:20 PM	H2 valve opened
5/10/2010	4:36:20 PM	Bubbler valve opened
5/10/2010	4:36:20 PM	Helium MFC set to  0.000000
5/10/2010	4:36:20 PM	H2 MFC set to  500.000000
5/10/2010	4:36:20 PM	BCl3 MFC set to  0.000000
5/10/2010	4:36:20 PM	SiCl4 MFC set to  0.000000
5/10/2010	4:36:20 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:36:21 PM	Tube furnace set to 1000
5/10/2010	4:58:00 PM	Helium valve closed
5/10/2010	4:58:00 PM	PH3 valve closed
5/10/2010	4:58:00 PM	Main Vac valve closed
5/10/2010	4:58:00 PM	Bypass valve closed
5/10/2010	4:58:00 PM	H2 valve opened
5/10/2010	4:58:00 PM	BCl3 valve opened
5/10/2010	4:58:00 PM	SiCl4 pre valve opened
5/10/2010	4:58:00 PM	SiCl4 post valve opened
5/10/2010	4:58:01 PM	Bubbler valve opened
5/10/2010	4:58:01 PM	Helium MFC set to  0.000000
5/10/2010	4:58:01 PM	H2 MFC set to  475.000000
5/10/2010	4:58:01 PM	BCl3 MFC set to  35.000000
5/10/2010	4:58:01 PM	SiCl4 MFC set to  350.000000
5/10/2010	4:58:01 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	4:58:01 PM	Tube furnace set to 1000
5/10/2010	5:18:01 PM	H2 valve closed
5/10/2010	5:18:01 PM	BCl3 valve closed
5/10/2010	5:18:01 PM	PH3 valve closed
5/10/2010	5:18:01 PM	SiCl4 pre valve closed
5/10/2010	5:18:01 PM	SiCl4 post valve closed
5/10/2010	5:18:01 PM	Main Vac valve closed
5/10/2010	5:18:01 PM	Bypass valve closed
5/10/2010	5:18:01 PM	Helium valve opened
5/10/2010	5:18:01 PM	Bubbler valve opened
5/10/2010	5:18:01 PM	Helium MFC set to  500.000000
5/10/2010	5:18:01 PM	H2 MFC set to  0.000000
5/10/2010	5:18:01 PM	BCl3 MFC set to  0.000000
5/10/2010	5:18:01 PM	SiCl4 MFC set to  0.000000
5/10/2010	5:18:01 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	5:18:01 PM	Tube furnace set to 0
5/10/2010	5:38:01 PM	Helium valve closed
5/10/2010	5:38:01 PM	H2 valve closed
5/10/2010	5:38:01 PM	BCl3 valve closed
5/10/2010	5:38:01 PM	PH3 valve closed
5/10/2010	5:38:01 PM	SiCl4 pre valve closed
5/10/2010	5:38:01 PM	SiCl4 post valve closed
5/10/2010	5:38:01 PM	Main Vac valve closed
5/10/2010	5:38:01 PM	Bypass valve closed
5/10/2010	5:38:01 PM	Bubbler valve closed
5/10/2010	5:38:01 PM	Helium MFC set to  0.000000
5/10/2010	5:38:01 PM	H2 MFC set to  0.000000
5/10/2010	5:38:01 PM	BCl3 MFC set to  0.000000
5/10/2010	5:38:01 PM	SiCl4 MFC set to  0.000000
5/10/2010	5:38:01 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	5:38:01 PM	Tube furnace set to 0
5/10/2010	5:38:01 PM	Run finished at 5:38 PM
5/10/2010	5:51:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/10/2010	5:52:00 PM	Recipe started at 5:51 PM
5/10/2010	5:52:00 PM	H2 valve closed
5/10/2010	5:52:00 PM	BCl3 valve closed
5/10/2010	5:52:00 PM	PH3 valve closed
5/10/2010	5:52:00 PM	SiCl4 pre valve closed
5/10/2010	5:52:00 PM	SiCl4 post valve closed
5/10/2010	5:52:00 PM	Main Vac valve closed
5/10/2010	5:52:00 PM	Bypass valve closed
5/10/2010	5:52:00 PM	Bubbler valve closed
5/10/2010	5:52:00 PM	Helium valve opened
5/10/2010	5:52:00 PM	Helium MFC set to  500.000000
5/10/2010	5:52:00 PM	H2 MFC set to  0.000000
5/10/2010	5:52:00 PM	BCl3 MFC set to  0.000000
5/10/2010	5:52:00 PM	SiCl4 MFC set to  0.000000
5/10/2010	5:52:00 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	5:52:00 PM	Tube furnace set to 0
5/10/2010	5:52:01 PM	Helium valve closed
5/10/2010	5:52:01 PM	H2 valve closed
5/10/2010	5:52:01 PM	BCl3 valve closed
5/10/2010	5:52:01 PM	PH3 valve closed
5/10/2010	5:52:01 PM	SiCl4 pre valve closed
5/10/2010	5:52:01 PM	SiCl4 post valve closed
5/10/2010	5:52:01 PM	Main Vac valve closed
5/10/2010	5:52:01 PM	Bypass valve closed
5/10/2010	5:52:01 PM	Bubbler valve closed
5/10/2010	5:52:02 PM	Helium MFC set to  0.000000
5/10/2010	5:52:02 PM	H2 MFC set to  0.000000
5/10/2010	5:52:02 PM	BCl3 MFC set to  0.000000
5/10/2010	5:52:02 PM	SiCl4 MFC set to  0.000000
5/10/2010	5:52:02 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	5:52:02 PM	Tube furnace set to 0
5/10/2010	5:52:17 PM	Helium valve closed
5/10/2010	5:52:17 PM	H2 valve closed
5/10/2010	5:52:17 PM	BCl3 valve closed
5/10/2010	5:52:17 PM	PH3 valve closed
5/10/2010	5:52:17 PM	SiCl4 pre valve closed
5/10/2010	5:52:17 PM	SiCl4 post valve closed
5/10/2010	5:52:17 PM	Main Vac valve closed
5/10/2010	5:52:17 PM	Bubbler valve closed
5/10/2010	5:52:17 PM	Bypass valve opened
5/10/2010	5:52:17 PM	Helium MFC set to  0.000000
5/10/2010	5:52:17 PM	H2 MFC set to  0.000000
5/10/2010	5:52:17 PM	BCl3 MFC set to  0.000000
5/10/2010	5:52:17 PM	SiCl4 MFC set to  0.000000
5/10/2010	5:52:17 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	5:52:17 PM	Tube furnace set to 0
5/10/2010	5:53:01 PM	Helium valve closed
5/10/2010	5:53:01 PM	H2 valve closed
5/10/2010	5:53:01 PM	BCl3 valve closed
5/10/2010	5:53:01 PM	PH3 valve closed
5/10/2010	5:53:01 PM	SiCl4 pre valve closed
5/10/2010	5:53:01 PM	SiCl4 post valve closed
5/10/2010	5:53:01 PM	Bubbler valve closed
5/10/2010	5:53:01 PM	Main Vac valve opened
5/10/2010	5:53:01 PM	Bypass valve opened
5/10/2010	5:53:01 PM	Helium MFC set to  0.000000
5/10/2010	5:53:01 PM	H2 MFC set to  0.000000
5/10/2010	5:53:01 PM	BCl3 MFC set to  0.000000
5/10/2010	5:53:01 PM	SiCl4 MFC set to  0.000000
5/10/2010	5:53:01 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	5:53:02 PM	Tube furnace set to 0
5/10/2010	5:58:02 PM	H2 valve closed
5/10/2010	5:58:02 PM	BCl3 valve closed
5/10/2010	5:58:02 PM	PH3 valve closed
5/10/2010	5:58:02 PM	SiCl4 pre valve closed
5/10/2010	5:58:02 PM	SiCl4 post valve closed
5/10/2010	5:58:02 PM	Main Vac valve closed
5/10/2010	5:58:02 PM	Bypass valve closed
5/10/2010	5:58:02 PM	Bubbler valve closed
5/10/2010	5:58:02 PM	Helium valve opened
5/10/2010	5:58:02 PM	Helium MFC set to  500.000000
5/10/2010	5:58:02 PM	H2 MFC set to  0.000000
5/10/2010	5:58:02 PM	BCl3 MFC set to  0.000000
5/10/2010	5:58:02 PM	SiCl4 MFC set to  0.000000
5/10/2010	5:58:02 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	5:58:02 PM	Tube furnace set to 0
5/10/2010	5:59:22 PM	Helium valve closed
5/10/2010	5:59:22 PM	H2 valve closed
5/10/2010	5:59:22 PM	BCl3 valve closed
5/10/2010	5:59:22 PM	PH3 valve closed
5/10/2010	5:59:22 PM	SiCl4 pre valve closed
5/10/2010	5:59:22 PM	SiCl4 post valve closed
5/10/2010	5:59:22 PM	Main Vac valve closed
5/10/2010	5:59:22 PM	Bypass valve closed
5/10/2010	5:59:22 PM	Bubbler valve closed
5/10/2010	5:59:22 PM	Helium MFC set to  0.000000
5/10/2010	5:59:22 PM	H2 MFC set to  0.000000
5/10/2010	5:59:22 PM	BCl3 MFC set to  0.000000
5/10/2010	5:59:22 PM	SiCl4 MFC set to  0.000000
5/10/2010	5:59:22 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	5:59:22 PM	Tube furnace set to 0
5/10/2010	5:59:37 PM	Helium valve closed
5/10/2010	5:59:37 PM	H2 valve closed
5/10/2010	5:59:37 PM	BCl3 valve closed
5/10/2010	5:59:37 PM	PH3 valve closed
5/10/2010	5:59:37 PM	SiCl4 pre valve closed
5/10/2010	5:59:37 PM	SiCl4 post valve closed
5/10/2010	5:59:37 PM	Main Vac valve closed
5/10/2010	5:59:37 PM	Bubbler valve closed
5/10/2010	5:59:37 PM	Bypass valve opened
5/10/2010	5:59:37 PM	Helium MFC set to  0.000000
5/10/2010	5:59:37 PM	H2 MFC set to  0.000000
5/10/2010	5:59:37 PM	BCl3 MFC set to  0.000000
5/10/2010	5:59:37 PM	SiCl4 MFC set to  0.000000
5/10/2010	5:59:37 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	5:59:37 PM	Tube furnace set to 0
5/10/2010	6:00:08 PM	Helium valve closed
5/10/2010	6:00:08 PM	H2 valve closed
5/10/2010	6:00:08 PM	BCl3 valve closed
5/10/2010	6:00:08 PM	PH3 valve closed
5/10/2010	6:00:08 PM	SiCl4 pre valve closed
5/10/2010	6:00:08 PM	SiCl4 post valve closed
5/10/2010	6:00:08 PM	Bubbler valve closed
5/10/2010	6:00:08 PM	Main Vac valve opened
5/10/2010	6:00:08 PM	Bypass valve opened
5/10/2010	6:00:08 PM	Helium MFC set to  0.000000
5/10/2010	6:00:08 PM	H2 MFC set to  0.000000
5/10/2010	6:00:08 PM	BCl3 MFC set to  0.000000
5/10/2010	6:00:08 PM	SiCl4 MFC set to  0.000000
5/10/2010	6:00:08 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	6:00:08 PM	Tube furnace set to 0
5/10/2010	6:05:08 PM	H2 valve closed
5/10/2010	6:05:08 PM	BCl3 valve closed
5/10/2010	6:05:08 PM	PH3 valve closed
5/10/2010	6:05:08 PM	SiCl4 pre valve closed
5/10/2010	6:05:08 PM	SiCl4 post valve closed
5/10/2010	6:05:08 PM	Main Vac valve closed
5/10/2010	6:05:08 PM	Bypass valve closed
5/10/2010	6:05:08 PM	Bubbler valve closed
5/10/2010	6:05:08 PM	Helium valve opened
5/10/2010	6:05:08 PM	Helium MFC set to  500.000000
5/10/2010	6:05:08 PM	H2 MFC set to  0.000000
5/10/2010	6:05:08 PM	BCl3 MFC set to  0.000000
5/10/2010	6:05:08 PM	SiCl4 MFC set to  0.000000
5/10/2010	6:05:08 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	6:05:09 PM	Tube furnace set to 0
5/10/2010	6:06:29 PM	Helium valve closed
5/10/2010	6:06:29 PM	H2 valve closed
5/10/2010	6:06:29 PM	BCl3 valve closed
5/10/2010	6:06:29 PM	PH3 valve closed
5/10/2010	6:06:29 PM	SiCl4 pre valve closed
5/10/2010	6:06:29 PM	SiCl4 post valve closed
5/10/2010	6:06:29 PM	Main Vac valve closed
5/10/2010	6:06:29 PM	Bypass valve closed
5/10/2010	6:06:29 PM	Bubbler valve closed
5/10/2010	6:06:29 PM	Helium MFC set to  0.000000
5/10/2010	6:06:29 PM	H2 MFC set to  0.000000
5/10/2010	6:06:29 PM	BCl3 MFC set to  0.000000
5/10/2010	6:06:29 PM	SiCl4 MFC set to  0.000000
5/10/2010	6:06:29 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	6:06:29 PM	Tube furnace set to 0
5/10/2010	6:06:44 PM	Helium valve closed
5/10/2010	6:06:44 PM	H2 valve closed
5/10/2010	6:06:44 PM	BCl3 valve closed
5/10/2010	6:06:44 PM	PH3 valve closed
5/10/2010	6:06:44 PM	SiCl4 pre valve closed
5/10/2010	6:06:44 PM	SiCl4 post valve closed
5/10/2010	6:06:44 PM	Main Vac valve closed
5/10/2010	6:06:44 PM	Bubbler valve closed
5/10/2010	6:06:44 PM	Bypass valve opened
5/10/2010	6:06:44 PM	Helium MFC set to  0.000000
5/10/2010	6:06:44 PM	H2 MFC set to  0.000000
5/10/2010	6:06:44 PM	BCl3 MFC set to  0.000000
5/10/2010	6:06:44 PM	SiCl4 MFC set to  0.000000
5/10/2010	6:06:44 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	6:06:44 PM	Tube furnace set to 0
5/10/2010	6:07:16 PM	Helium valve closed
5/10/2010	6:07:16 PM	H2 valve closed
5/10/2010	6:07:16 PM	BCl3 valve closed
5/10/2010	6:07:16 PM	PH3 valve closed
5/10/2010	6:07:16 PM	SiCl4 pre valve closed
5/10/2010	6:07:16 PM	SiCl4 post valve closed
5/10/2010	6:07:16 PM	Bubbler valve closed
5/10/2010	6:07:16 PM	Main Vac valve opened
5/10/2010	6:07:16 PM	Bypass valve opened
5/10/2010	6:07:16 PM	Helium MFC set to  0.000000
5/10/2010	6:07:16 PM	H2 MFC set to  0.000000
5/10/2010	6:07:16 PM	BCl3 MFC set to  0.000000
5/10/2010	6:07:16 PM	SiCl4 MFC set to  0.000000
5/10/2010	6:07:16 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	6:07:16 PM	Tube furnace set to 0
5/10/2010	6:12:16 PM	Helium valve closed
5/10/2010	6:12:16 PM	H2 valve closed
5/10/2010	6:12:16 PM	BCl3 valve closed
5/10/2010	6:12:16 PM	PH3 valve closed
5/10/2010	6:12:16 PM	SiCl4 pre valve closed
5/10/2010	6:12:16 PM	SiCl4 post valve closed
5/10/2010	6:12:16 PM	Bubbler valve closed
5/10/2010	6:12:16 PM	Main Vac valve opened
5/10/2010	6:12:16 PM	Bypass valve opened
5/10/2010	6:12:16 PM	Helium MFC set to  0.000000
5/10/2010	6:12:16 PM	H2 MFC set to  0.000000
5/10/2010	6:12:16 PM	BCl3 MFC set to  0.000000
5/10/2010	6:12:16 PM	SiCl4 MFC set to  0.000000
5/10/2010	6:12:16 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	6:12:16 PM	Tube furnace set to 0
5/10/2010	6:12:17 PM	Run finished at 6:12 PM
5/10/2010	6:12:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/10/2010	7:40:08 PM	Main Vac valve closed
5/10/2010	7:40:09 PM	Bypass valve closed
5/10/2010	7:40:18 PM	Bypass valve opened
5/10/2010	7:40:19 PM	Main Vac valve opened
5/10/2010	7:40:56 PM	Recipe started at 7:40 PM
5/10/2010	7:40:56 PM	Helium valve closed
5/10/2010	7:40:56 PM	BCl3 valve closed
5/10/2010	7:40:56 PM	PH3 valve closed
5/10/2010	7:40:56 PM	SiCl4 pre valve closed
5/10/2010	7:40:56 PM	SiCl4 post valve closed
5/10/2010	7:40:56 PM	Main Vac valve closed
5/10/2010	7:40:56 PM	Bypass valve closed
5/10/2010	7:40:56 PM	Bubbler valve closed
5/10/2010	7:40:56 PM	H2 valve opened
5/10/2010	7:40:56 PM	Helium MFC set to  0.000000
5/10/2010	7:40:56 PM	H2 MFC set to  500.000000
5/10/2010	7:40:56 PM	BCl3 MFC set to  0.000000
5/10/2010	7:40:56 PM	SiCl4 MFC set to  0.000000
5/10/2010	7:40:56 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	7:40:56 PM	Tube furnace set to 0
5/10/2010	7:42:19 PM	Helium valve closed
5/10/2010	7:42:19 PM	BCl3 valve closed
5/10/2010	7:42:19 PM	PH3 valve closed
5/10/2010	7:42:19 PM	SiCl4 pre valve closed
5/10/2010	7:42:19 PM	SiCl4 post valve closed
5/10/2010	7:42:19 PM	Main Vac valve closed
5/10/2010	7:42:19 PM	Bypass valve closed
5/10/2010	7:42:19 PM	H2 valve opened
5/10/2010	7:42:19 PM	Bubbler valve opened
5/10/2010	7:42:19 PM	Helium MFC set to  0.000000
5/10/2010	7:42:19 PM	H2 MFC set to  500.000000
5/10/2010	7:42:19 PM	BCl3 MFC set to  0.000000
5/10/2010	7:42:19 PM	SiCl4 MFC set to  0.000000
5/10/2010	7:42:19 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	7:42:19 PM	Tube furnace set to 1000
5/10/2010	8:03:59 PM	Helium valve closed
5/10/2010	8:03:59 PM	PH3 valve closed
5/10/2010	8:03:59 PM	Main Vac valve closed
5/10/2010	8:03:59 PM	Bypass valve closed
5/10/2010	8:03:59 PM	H2 valve opened
5/10/2010	8:03:59 PM	BCl3 valve opened
5/10/2010	8:03:59 PM	SiCl4 pre valve opened
5/10/2010	8:03:59 PM	SiCl4 post valve opened
5/10/2010	8:03:59 PM	Bubbler valve opened
5/10/2010	8:03:59 PM	Helium MFC set to  0.000000
5/10/2010	8:03:59 PM	H2 MFC set to  475.000000
5/10/2010	8:03:59 PM	BCl3 MFC set to  35.000000
5/10/2010	8:03:59 PM	SiCl4 MFC set to  350.000000
5/10/2010	8:03:59 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	8:03:59 PM	Tube furnace set to 1000
5/10/2010	8:18:59 PM	H2 valve closed
5/10/2010	8:18:59 PM	BCl3 valve closed
5/10/2010	8:18:59 PM	PH3 valve closed
5/10/2010	8:18:59 PM	SiCl4 pre valve closed
5/10/2010	8:18:59 PM	SiCl4 post valve closed
5/10/2010	8:18:59 PM	Main Vac valve closed
5/10/2010	8:18:59 PM	Bypass valve closed
5/10/2010	8:18:59 PM	Helium valve opened
5/10/2010	8:18:59 PM	Bubbler valve opened
5/10/2010	8:18:59 PM	Helium MFC set to  500.000000
5/10/2010	8:18:59 PM	H2 MFC set to  0.000000
5/10/2010	8:18:59 PM	BCl3 MFC set to  0.000000
5/10/2010	8:18:59 PM	SiCl4 MFC set to  0.000000
5/10/2010	8:18:59 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	8:18:59 PM	Tube furnace set to 0
5/10/2010	8:38:59 PM	Helium valve closed
5/10/2010	8:38:59 PM	H2 valve closed
5/10/2010	8:38:59 PM	BCl3 valve closed
5/10/2010	8:38:59 PM	PH3 valve closed
5/10/2010	8:38:59 PM	SiCl4 pre valve closed
5/10/2010	8:38:59 PM	SiCl4 post valve closed
5/10/2010	8:38:59 PM	Main Vac valve closed
5/10/2010	8:38:59 PM	Bypass valve closed
5/10/2010	8:38:59 PM	Bubbler valve closed
5/10/2010	8:38:59 PM	Helium MFC set to  0.000000
5/10/2010	8:38:59 PM	H2 MFC set to  0.000000
5/10/2010	8:38:59 PM	BCl3 MFC set to  0.000000
5/10/2010	8:38:59 PM	SiCl4 MFC set to  0.000000
5/10/2010	8:38:59 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	8:38:59 PM	Tube furnace set to 0
5/10/2010	8:39:00 PM	Run finished at 8:39 PM
5/10/2010	8:57:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2010	8:57:53 PM	Recipe started at 8:57 PM
5/10/2010	8:57:53 PM	Helium valve closed
5/10/2010	8:57:53 PM	H2 valve closed
5/10/2010	8:57:53 PM	BCl3 valve closed
5/10/2010	8:57:53 PM	PH3 valve closed
5/10/2010	8:57:53 PM	SiCl4 pre valve closed
5/10/2010	8:57:53 PM	SiCl4 post valve closed
5/10/2010	8:57:53 PM	Main Vac valve closed
5/10/2010	8:57:53 PM	Bubbler valve closed
5/10/2010	8:57:53 PM	Bypass valve opened
5/10/2010	8:57:53 PM	Helium MFC set to  0.000000
5/10/2010	8:57:53 PM	H2 MFC set to  0.000000
5/10/2010	8:57:53 PM	BCl3 MFC set to  0.000000
5/10/2010	8:57:53 PM	SiCl4 MFC set to  0.000000
5/10/2010	8:57:53 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	8:57:54 PM	Tube furnace set to 0
5/10/2010	8:58:39 PM	Helium valve closed
5/10/2010	8:58:39 PM	H2 valve closed
5/10/2010	8:58:39 PM	BCl3 valve closed
5/10/2010	8:58:39 PM	PH3 valve closed
5/10/2010	8:58:39 PM	SiCl4 pre valve closed
5/10/2010	8:58:39 PM	SiCl4 post valve closed
5/10/2010	8:58:39 PM	Bubbler valve closed
5/10/2010	8:58:39 PM	Main Vac valve opened
5/10/2010	8:58:39 PM	Bypass valve opened
5/10/2010	8:58:39 PM	Helium MFC set to  0.000000
5/10/2010	8:58:39 PM	H2 MFC set to  0.000000
5/10/2010	8:58:39 PM	BCl3 MFC set to  0.000000
5/10/2010	8:58:39 PM	SiCl4 MFC set to  0.000000
5/10/2010	8:58:39 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	8:58:39 PM	Tube furnace set to 0
5/10/2010	8:58:39 PM	Run finished at 8:58 PM
5/10/2010	8:58:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2010	8:59:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/10/2010	8:59:21 PM	Recipe started at 8:59 PM
5/10/2010	8:59:21 PM	H2 valve closed
5/10/2010	8:59:21 PM	BCl3 valve closed
5/10/2010	8:59:21 PM	PH3 valve closed
5/10/2010	8:59:21 PM	SiCl4 pre valve closed
5/10/2010	8:59:21 PM	SiCl4 post valve closed
5/10/2010	8:59:21 PM	Main Vac valve closed
5/10/2010	8:59:21 PM	Bypass valve closed
5/10/2010	8:59:21 PM	Bubbler valve closed
5/10/2010	8:59:21 PM	Helium valve opened
5/10/2010	8:59:21 PM	Helium MFC set to  500.000000
5/10/2010	8:59:21 PM	H2 MFC set to  0.000000
5/10/2010	8:59:21 PM	BCl3 MFC set to  0.000000
5/10/2010	8:59:21 PM	SiCl4 MFC set to  0.000000
5/10/2010	8:59:21 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	8:59:21 PM	Tube furnace set to 0
5/10/2010	8:59:35 PM	Helium valve closed
5/10/2010	8:59:35 PM	H2 valve closed
5/10/2010	8:59:35 PM	BCl3 valve closed
5/10/2010	8:59:35 PM	PH3 valve closed
5/10/2010	8:59:35 PM	SiCl4 pre valve closed
5/10/2010	8:59:35 PM	SiCl4 post valve closed
5/10/2010	8:59:35 PM	Main Vac valve closed
5/10/2010	8:59:35 PM	Bypass valve closed
5/10/2010	8:59:35 PM	Bubbler valve closed
5/10/2010	8:59:35 PM	Helium MFC set to  0.000000
5/10/2010	8:59:35 PM	H2 MFC set to  0.000000
5/10/2010	8:59:35 PM	BCl3 MFC set to  0.000000
5/10/2010	8:59:35 PM	SiCl4 MFC set to  0.000000
5/10/2010	8:59:35 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	8:59:35 PM	Tube furnace set to 0
5/10/2010	8:59:50 PM	Helium valve closed
5/10/2010	8:59:50 PM	H2 valve closed
5/10/2010	8:59:50 PM	BCl3 valve closed
5/10/2010	8:59:50 PM	PH3 valve closed
5/10/2010	8:59:50 PM	SiCl4 pre valve closed
5/10/2010	8:59:50 PM	SiCl4 post valve closed
5/10/2010	8:59:50 PM	Main Vac valve closed
5/10/2010	8:59:50 PM	Bubbler valve closed
5/10/2010	8:59:50 PM	Bypass valve opened
5/10/2010	8:59:50 PM	Helium MFC set to  0.000000
5/10/2010	8:59:50 PM	H2 MFC set to  0.000000
5/10/2010	8:59:50 PM	BCl3 MFC set to  0.000000
5/10/2010	8:59:50 PM	SiCl4 MFC set to  0.000000
5/10/2010	8:59:50 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	8:59:50 PM	Tube furnace set to 0
5/10/2010	9:00:05 PM	Helium valve closed
5/10/2010	9:00:05 PM	H2 valve closed
5/10/2010	9:00:05 PM	BCl3 valve closed
5/10/2010	9:00:05 PM	PH3 valve closed
5/10/2010	9:00:05 PM	SiCl4 pre valve closed
5/10/2010	9:00:05 PM	SiCl4 post valve closed
5/10/2010	9:00:05 PM	Bubbler valve closed
5/10/2010	9:00:05 PM	Main Vac valve opened
5/10/2010	9:00:05 PM	Bypass valve opened
5/10/2010	9:00:05 PM	Helium MFC set to  0.000000
5/10/2010	9:00:05 PM	H2 MFC set to  0.000000
5/10/2010	9:00:05 PM	BCl3 MFC set to  0.000000
5/10/2010	9:00:05 PM	SiCl4 MFC set to  0.000000
5/10/2010	9:00:05 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:00:06 PM	Tube furnace set to 0
5/10/2010	9:05:06 PM	H2 valve closed
5/10/2010	9:05:06 PM	BCl3 valve closed
5/10/2010	9:05:06 PM	PH3 valve closed
5/10/2010	9:05:06 PM	SiCl4 pre valve closed
5/10/2010	9:05:06 PM	SiCl4 post valve closed
5/10/2010	9:05:06 PM	Main Vac valve closed
5/10/2010	9:05:06 PM	Bypass valve closed
5/10/2010	9:05:06 PM	Bubbler valve closed
5/10/2010	9:05:06 PM	Helium valve opened
5/10/2010	9:05:06 PM	Helium MFC set to  500.000000
5/10/2010	9:05:06 PM	H2 MFC set to  0.000000
5/10/2010	9:05:06 PM	BCl3 MFC set to  0.000000
5/10/2010	9:05:06 PM	SiCl4 MFC set to  0.000000
5/10/2010	9:05:06 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:05:06 PM	Tube furnace set to 0
5/10/2010	9:06:27 PM	Helium valve closed
5/10/2010	9:06:27 PM	H2 valve closed
5/10/2010	9:06:27 PM	BCl3 valve closed
5/10/2010	9:06:27 PM	PH3 valve closed
5/10/2010	9:06:27 PM	SiCl4 pre valve closed
5/10/2010	9:06:27 PM	SiCl4 post valve closed
5/10/2010	9:06:27 PM	Main Vac valve closed
5/10/2010	9:06:27 PM	Bypass valve closed
5/10/2010	9:06:27 PM	Bubbler valve closed
5/10/2010	9:06:27 PM	Helium MFC set to  0.000000
5/10/2010	9:06:27 PM	H2 MFC set to  0.000000
5/10/2010	9:06:27 PM	BCl3 MFC set to  0.000000
5/10/2010	9:06:27 PM	SiCl4 MFC set to  0.000000
5/10/2010	9:06:27 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:06:27 PM	Tube furnace set to 0
5/10/2010	9:06:42 PM	Helium valve closed
5/10/2010	9:06:42 PM	H2 valve closed
5/10/2010	9:06:42 PM	BCl3 valve closed
5/10/2010	9:06:42 PM	PH3 valve closed
5/10/2010	9:06:42 PM	SiCl4 pre valve closed
5/10/2010	9:06:42 PM	SiCl4 post valve closed
5/10/2010	9:06:42 PM	Main Vac valve closed
5/10/2010	9:06:42 PM	Bubbler valve closed
5/10/2010	9:06:42 PM	Bypass valve opened
5/10/2010	9:06:42 PM	Helium MFC set to  0.000000
5/10/2010	9:06:42 PM	H2 MFC set to  0.000000
5/10/2010	9:06:42 PM	BCl3 MFC set to  0.000000
5/10/2010	9:06:42 PM	SiCl4 MFC set to  0.000000
5/10/2010	9:06:42 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:06:42 PM	Tube furnace set to 0
5/10/2010	9:07:14 PM	Helium valve closed
5/10/2010	9:07:14 PM	H2 valve closed
5/10/2010	9:07:14 PM	BCl3 valve closed
5/10/2010	9:07:14 PM	PH3 valve closed
5/10/2010	9:07:14 PM	SiCl4 pre valve closed
5/10/2010	9:07:14 PM	SiCl4 post valve closed
5/10/2010	9:07:14 PM	Bubbler valve closed
5/10/2010	9:07:14 PM	Main Vac valve opened
5/10/2010	9:07:14 PM	Bypass valve opened
5/10/2010	9:07:14 PM	Helium MFC set to  0.000000
5/10/2010	9:07:14 PM	H2 MFC set to  0.000000
5/10/2010	9:07:14 PM	BCl3 MFC set to  0.000000
5/10/2010	9:07:14 PM	SiCl4 MFC set to  0.000000
5/10/2010	9:07:14 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:07:14 PM	Tube furnace set to 0
5/10/2010	9:08:04 PM	H2 valve closed
5/10/2010	9:08:04 PM	BCl3 valve closed
5/10/2010	9:08:04 PM	PH3 valve closed
5/10/2010	9:08:04 PM	SiCl4 pre valve closed
5/10/2010	9:08:04 PM	SiCl4 post valve closed
5/10/2010	9:08:04 PM	Main Vac valve closed
5/10/2010	9:08:04 PM	Bypass valve closed
5/10/2010	9:08:04 PM	Bubbler valve closed
5/10/2010	9:08:04 PM	Helium valve opened
5/10/2010	9:08:04 PM	Helium MFC set to  500.000000
5/10/2010	9:08:04 PM	H2 MFC set to  0.000000
5/10/2010	9:08:04 PM	BCl3 MFC set to  0.000000
5/10/2010	9:08:04 PM	SiCl4 MFC set to  0.000000
5/10/2010	9:08:04 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:08:04 PM	Tube furnace set to 0
5/10/2010	9:09:25 PM	Helium valve closed
5/10/2010	9:09:25 PM	H2 valve closed
5/10/2010	9:09:25 PM	BCl3 valve closed
5/10/2010	9:09:25 PM	PH3 valve closed
5/10/2010	9:09:25 PM	SiCl4 pre valve closed
5/10/2010	9:09:25 PM	SiCl4 post valve closed
5/10/2010	9:09:25 PM	Main Vac valve closed
5/10/2010	9:09:25 PM	Bypass valve closed
5/10/2010	9:09:25 PM	Bubbler valve closed
5/10/2010	9:09:25 PM	Helium MFC set to  0.000000
5/10/2010	9:09:25 PM	H2 MFC set to  0.000000
5/10/2010	9:09:25 PM	BCl3 MFC set to  0.000000
5/10/2010	9:09:25 PM	SiCl4 MFC set to  0.000000
5/10/2010	9:09:25 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:09:25 PM	Tube furnace set to 0
5/10/2010	9:09:40 PM	Helium valve closed
5/10/2010	9:09:40 PM	H2 valve closed
5/10/2010	9:09:40 PM	BCl3 valve closed
5/10/2010	9:09:40 PM	PH3 valve closed
5/10/2010	9:09:40 PM	SiCl4 pre valve closed
5/10/2010	9:09:40 PM	SiCl4 post valve closed
5/10/2010	9:09:40 PM	Main Vac valve closed
5/10/2010	9:09:40 PM	Bubbler valve closed
5/10/2010	9:09:40 PM	Bypass valve opened
5/10/2010	9:09:40 PM	Helium MFC set to  0.000000
5/10/2010	9:09:40 PM	H2 MFC set to  0.000000
5/10/2010	9:09:40 PM	BCl3 MFC set to  0.000000
5/10/2010	9:09:40 PM	SiCl4 MFC set to  0.000000
5/10/2010	9:09:40 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:09:40 PM	Tube furnace set to 0
5/10/2010	9:10:12 PM	Helium valve closed
5/10/2010	9:10:12 PM	H2 valve closed
5/10/2010	9:10:12 PM	BCl3 valve closed
5/10/2010	9:10:12 PM	PH3 valve closed
5/10/2010	9:10:12 PM	SiCl4 pre valve closed
5/10/2010	9:10:12 PM	SiCl4 post valve closed
5/10/2010	9:10:12 PM	Bubbler valve closed
5/10/2010	9:10:12 PM	Main Vac valve opened
5/10/2010	9:10:12 PM	Bypass valve opened
5/10/2010	9:10:12 PM	Helium MFC set to  0.000000
5/10/2010	9:10:12 PM	H2 MFC set to  0.000000
5/10/2010	9:10:12 PM	BCl3 MFC set to  0.000000
5/10/2010	9:10:12 PM	SiCl4 MFC set to  0.000000
5/10/2010	9:10:12 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:10:12 PM	Tube furnace set to 0
5/10/2010	9:15:12 PM	Helium valve closed
5/10/2010	9:15:12 PM	H2 valve closed
5/10/2010	9:15:12 PM	BCl3 valve closed
5/10/2010	9:15:12 PM	PH3 valve closed
5/10/2010	9:15:12 PM	SiCl4 pre valve closed
5/10/2010	9:15:12 PM	SiCl4 post valve closed
5/10/2010	9:15:12 PM	Bubbler valve closed
5/10/2010	9:15:12 PM	Main Vac valve opened
5/10/2010	9:15:12 PM	Bypass valve opened
5/10/2010	9:15:12 PM	Helium MFC set to  0.000000
5/10/2010	9:15:12 PM	H2 MFC set to  0.000000
5/10/2010	9:15:12 PM	BCl3 MFC set to  0.000000
5/10/2010	9:15:12 PM	SiCl4 MFC set to  0.000000
5/10/2010	9:15:12 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:15:12 PM	Tube furnace set to 0
5/10/2010	9:15:13 PM	Run finished at 9:15 PM
5/10/2010	9:15:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
5/10/2010	9:16:17 PM	Main Vac valve closed
5/10/2010	9:16:19 PM	Bypass valve closed
5/10/2010	9:16:29 PM	Bypass valve opened
5/10/2010	9:16:30 PM	Main Vac valve opened
5/10/2010	9:17:09 PM	Recipe started at 9:17 PM
5/10/2010	9:17:09 PM	Helium valve closed
5/10/2010	9:17:09 PM	BCl3 valve closed
5/10/2010	9:17:09 PM	PH3 valve closed
5/10/2010	9:17:09 PM	SiCl4 pre valve closed
5/10/2010	9:17:09 PM	SiCl4 post valve closed
5/10/2010	9:17:09 PM	Main Vac valve closed
5/10/2010	9:17:09 PM	Bypass valve closed
5/10/2010	9:17:09 PM	Bubbler valve closed
5/10/2010	9:17:09 PM	H2 valve opened
5/10/2010	9:17:09 PM	Helium MFC set to  0.000000
5/10/2010	9:17:09 PM	H2 MFC set to  500.000000
5/10/2010	9:17:09 PM	BCl3 MFC set to  0.000000
5/10/2010	9:17:09 PM	SiCl4 MFC set to  0.000000
5/10/2010	9:17:09 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:17:09 PM	Tube furnace set to 0
5/10/2010	9:18:31 PM	Helium valve closed
5/10/2010	9:18:31 PM	BCl3 valve closed
5/10/2010	9:18:31 PM	PH3 valve closed
5/10/2010	9:18:31 PM	SiCl4 pre valve closed
5/10/2010	9:18:31 PM	SiCl4 post valve closed
5/10/2010	9:18:31 PM	Main Vac valve closed
5/10/2010	9:18:31 PM	Bypass valve closed
5/10/2010	9:18:31 PM	H2 valve opened
5/10/2010	9:18:31 PM	Bubbler valve opened
5/10/2010	9:18:31 PM	Helium MFC set to  0.000000
5/10/2010	9:18:31 PM	H2 MFC set to  500.000000
5/10/2010	9:18:31 PM	BCl3 MFC set to  0.000000
5/10/2010	9:18:31 PM	SiCl4 MFC set to  0.000000
5/10/2010	9:18:31 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:18:31 PM	Tube furnace set to 1000
5/10/2010	9:41:51 PM	Helium valve closed
5/10/2010	9:41:51 PM	PH3 valve closed
5/10/2010	9:41:51 PM	Main Vac valve closed
5/10/2010	9:41:51 PM	Bypass valve closed
5/10/2010	9:41:51 PM	H2 valve opened
5/10/2010	9:41:51 PM	BCl3 valve opened
5/10/2010	9:41:51 PM	SiCl4 pre valve opened
5/10/2010	9:41:51 PM	SiCl4 post valve opened
5/10/2010	9:41:51 PM	Bubbler valve opened
5/10/2010	9:41:51 PM	Helium MFC set to  0.000000
5/10/2010	9:41:51 PM	H2 MFC set to  475.000000
5/10/2010	9:41:51 PM	BCl3 MFC set to  35.000000
5/10/2010	9:41:51 PM	SiCl4 MFC set to  350.000000
5/10/2010	9:41:51 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	9:41:51 PM	Tube furnace set to 1000
5/10/2010	10:11:51 PM	H2 valve closed
5/10/2010	10:11:51 PM	BCl3 valve closed
5/10/2010	10:11:51 PM	PH3 valve closed
5/10/2010	10:11:51 PM	SiCl4 pre valve closed
5/10/2010	10:11:51 PM	SiCl4 post valve closed
5/10/2010	10:11:51 PM	Main Vac valve closed
5/10/2010	10:11:51 PM	Bypass valve closed
5/10/2010	10:11:51 PM	Helium valve opened
5/10/2010	10:11:51 PM	Bubbler valve opened
5/10/2010	10:11:51 PM	Helium MFC set to  500.000000
5/10/2010	10:11:51 PM	H2 MFC set to  0.000000
5/10/2010	10:11:51 PM	BCl3 MFC set to  0.000000
5/10/2010	10:11:51 PM	SiCl4 MFC set to  0.000000
5/10/2010	10:11:51 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	10:11:51 PM	Tube furnace set to 0
5/10/2010	10:31:51 PM	Helium valve closed
5/10/2010	10:31:51 PM	H2 valve closed
5/10/2010	10:31:51 PM	BCl3 valve closed
5/10/2010	10:31:51 PM	PH3 valve closed
5/10/2010	10:31:51 PM	SiCl4 pre valve closed
5/10/2010	10:31:51 PM	SiCl4 post valve closed
5/10/2010	10:31:51 PM	Main Vac valve closed
5/10/2010	10:31:51 PM	Bypass valve closed
5/10/2010	10:31:51 PM	Bubbler valve closed
5/10/2010	10:31:51 PM	Helium MFC set to  0.000000
5/10/2010	10:31:51 PM	H2 MFC set to  0.000000
5/10/2010	10:31:51 PM	BCl3 MFC set to  0.000000
5/10/2010	10:31:51 PM	SiCl4 MFC set to  0.000000
5/10/2010	10:31:51 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	10:31:52 PM	Tube furnace set to 0
5/10/2010	10:31:52 PM	Run finished at 10:31 PM
5/10/2010	11:02:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2010	11:02:26 PM	Recipe started at 11:02 PM
5/10/2010	11:02:26 PM	H2 valve closed
5/10/2010	11:02:26 PM	BCl3 valve closed
5/10/2010	11:02:26 PM	PH3 valve closed
5/10/2010	11:02:26 PM	SiCl4 pre valve closed
5/10/2010	11:02:26 PM	SiCl4 post valve closed
5/10/2010	11:02:26 PM	Main Vac valve closed
5/10/2010	11:02:26 PM	Bypass valve closed
5/10/2010	11:02:26 PM	Bubbler valve closed
5/10/2010	11:02:26 PM	Helium valve opened
5/10/2010	11:02:26 PM	Helium MFC set to  500.000000
5/10/2010	11:02:26 PM	H2 MFC set to  0.000000
5/10/2010	11:02:26 PM	BCl3 MFC set to  0.000000
5/10/2010	11:02:26 PM	SiCl4 MFC set to  0.000000
5/10/2010	11:02:26 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:02:26 PM	Tube furnace set to 0
5/10/2010	11:02:33 PM	Helium valve closed
5/10/2010	11:02:33 PM	H2 valve closed
5/10/2010	11:02:33 PM	BCl3 valve closed
5/10/2010	11:02:33 PM	PH3 valve closed
5/10/2010	11:02:33 PM	SiCl4 pre valve closed
5/10/2010	11:02:33 PM	SiCl4 post valve closed
5/10/2010	11:02:33 PM	Main Vac valve closed
5/10/2010	11:02:33 PM	Bypass valve closed
5/10/2010	11:02:33 PM	Bubbler valve closed
5/10/2010	11:02:33 PM	Helium MFC set to  0.000000
5/10/2010	11:02:33 PM	H2 MFC set to  0.000000
5/10/2010	11:02:33 PM	BCl3 MFC set to  0.000000
5/10/2010	11:02:33 PM	SiCl4 MFC set to  0.000000
5/10/2010	11:02:33 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:02:33 PM	Tube furnace set to 0
5/10/2010	11:02:34 PM	Run finished at 11:02 PM
5/10/2010	11:02:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/10/2010	11:13:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/10/2010	11:13:34 PM	Recipe started at 11:13 PM
5/10/2010	11:13:34 PM	Helium valve closed
5/10/2010	11:13:34 PM	H2 valve closed
5/10/2010	11:13:34 PM	BCl3 valve closed
5/10/2010	11:13:34 PM	PH3 valve closed
5/10/2010	11:13:34 PM	SiCl4 pre valve closed
5/10/2010	11:13:34 PM	SiCl4 post valve closed
5/10/2010	11:13:34 PM	Main Vac valve closed
5/10/2010	11:13:34 PM	Bubbler valve closed
5/10/2010	11:13:34 PM	Bypass valve opened
5/10/2010	11:13:34 PM	Helium MFC set to  0.000000
5/10/2010	11:13:34 PM	H2 MFC set to  0.000000
5/10/2010	11:13:34 PM	BCl3 MFC set to  0.000000
5/10/2010	11:13:34 PM	SiCl4 MFC set to  0.000000
5/10/2010	11:13:34 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:13:34 PM	Tube furnace set to 0
5/10/2010	11:14:21 PM	Helium valve closed
5/10/2010	11:14:21 PM	H2 valve closed
5/10/2010	11:14:21 PM	BCl3 valve closed
5/10/2010	11:14:21 PM	PH3 valve closed
5/10/2010	11:14:21 PM	SiCl4 pre valve closed
5/10/2010	11:14:21 PM	SiCl4 post valve closed
5/10/2010	11:14:21 PM	Bubbler valve closed
5/10/2010	11:14:21 PM	Main Vac valve opened
5/10/2010	11:14:21 PM	Bypass valve opened
5/10/2010	11:14:21 PM	Helium MFC set to  0.000000
5/10/2010	11:14:21 PM	H2 MFC set to  0.000000
5/10/2010	11:14:21 PM	BCl3 MFC set to  0.000000
5/10/2010	11:14:21 PM	SiCl4 MFC set to  0.000000
5/10/2010	11:14:21 PM	Bypass solenoid MFC set to  0.000000
5/10/2010	11:14:21 PM	Tube furnace set to 0
5/10/2010	11:14:22 PM	Run finished at 11:14 PM
5/10/2010	11:14:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
